Optical waveguides fabricated in atomic layer deposited Al2O3 by ultrafast laser ablation

• Published in: Results in optics Vol. 2; p. 100060
• Main Authors: Lizarraga-Medina, Eder German, Castillo, Gabriel R., Jurado, Jorge Adolfo, Caballero-Espitia, Diana Laura, Camacho-Lopez, Santiago, Contreras, Oscar, Santillan, Ricardo, Marquez, Heriberto, Tiznado, Hugo
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.01.2021; Elsevier
• Subjects: Atomic layer deposition; Optical waveguides; Ultrafast laser ablation; Atomic layer deposition; Ultrafast laser ablation; Optical waveguides

•Atomic layer deposited Al2O3 optical rib waveguides by ultrafast laser ablation.•Good confinement and low loss at the visible range.•Fabrication method is fast and reliable for prototyping of photonic components. We report on the fabrication of optical waveguides by ultrafast laser ablation of Al2O...