Physical and micro-nano-structure properties of chromium nitride coating deposited by RF sputtering using dynamic glancing angle deposition

• Published in: Surface & coatings technology Vol. 372; pp. 268 - 277
• Main Authors: Jimenez, M.J.M., Antunes, V., Cucatti, S., Riul, A., Zagonel, L.F., Figueroa, C.A., Wisnivesky, D., Alvarez, F.
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 25.08.2019; Elsevier BV
• Subjects: Audio frequencies; Chromium nitride; Coatings; Columnar structure; Compressive properties; Crystallites; Deposition; Dynamic glancing angle deposition; Hardness; Magnetron sputtering; Morphology; Multi-nano periodic structures; Periodic structures; Periodic variations; Physical properties; Programmable logic controllers; Residual stress; Substrates; Thickness; Time dependence; Titanium carbonitride; Multi-nano periodic structures; Dynamic glancing angle deposition; Hardness; Chromium nitride

The CrN films were grown by rf-magnetron sputtering using a dynamic glancing angle deposition technique. In this technique, the substrate oscillates in front of the sputtering target with an angular amplitude and frequency commanded by a Programmable Logic Controller. The purpose of this paper is to...