Physical and micro-nano-structure properties of chromium nitride coating deposited by RF sputtering using dynamic glancing angle deposition - Jimenez, M.J.M.; Antunes, V.; Cucatti, S.; Riul, A.; Zagonel, L.F.; Figueroa, C.A.; Wisnivesky, D.; Alvarez, F. (Surface & coatings technology, 2019)
Keywords: Audio frequencies; Chromium nitride; Coatings; Columnar structure; Compressive properties; Crystallites; Deposition; Dynamic glancing angle deposition; Hardness; Magnetron sputtering; Morphology; Multi-nano periodic structures; Periodic structures; Periodic variations; Physical properties; Programmable logic controllers; Residual stress; Substrates; Thickness; Time dependence; Titanium carbonitride; Multi-nano periodic structures; Dynamic glancing angle deposition; Hardness; Chromium nitride