Electron beam probe quantization of compound composition: surface phases and surface roughness

• Published in: Thin solid films Vol. 431; no. 1-2; pp. 277 - 283
• Main Authors: Yamada, A, Fons, P, Matsubara, K, Iwata, K, Sakurai, K, Niki, S
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.05.2003
• Subjects: Composition; EPMA; Micro-analysis; Surface phase; Surface roughness; Micro-analysis; Composition; Surface roughness; Surface phase; EPMA

In electron probe beam micro-analysis (EPMA), the electron accelerating voltage decides the penetration depth of the probe beam therefore the voltage dependence of the characteristic X-ray emission intensities reflects the composition depth distribution. This effect can be utilized to determine an a...