Partially integrated cantilever-based airborne nanoparticle detector for continuous carbon aerosol mass concentration monitoring - Wasisto, H. S.; Merzsch, S.; Uhde, E.; Waag, A.; Peiner, E. (Journal of sensors and sensor systems, 2015)
Keywords: Aluminum; Carbon; Etching; Flow velocity; Microelectromechanical systems; Monitoring; Nanomaterials; Nanoparticles; Nanotechnology; Phase locked loops; Phase locked systems; Real time; Sensors; Service life assessment; Silicon wafers; Time measurement; Tracking systems; Ultrasonic cleaning; Ultrasonic testing; Workplaces