Exact analysis of the propagation of acoustic waves in multilayered anisotropic piezoelectric plates

• Published in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control Vol. 41; no. 3; pp. 375 - 390
• Main Authors: Stewart, J.T., Yong, Y.-K.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.05.1994; Institute of Electrical and Electronics Engineers
• Subjects: Acoustic propagation; Acoustic wave devices, piezoelectric and piezoresistive devices; Acoustic waves; Acoustics; Anisotropic magnetoresistance; Applied sciences; Conducting materials; Electrodes; Electronics; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Performance analysis; Physics; Piezoelectric films; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Semiconductor thin films; Silicon; Ultrasonics, quantum acoustics, and physical effects of sound; Zinc oxide; Acoustic wave device; Wave propagation; Numerical solution; Transfer matrix method; Piezoelectricity; Layered materials; Plates

Exact analysis of the propagation of acoustic waves in multilayered piezoelectric plates is performed using the transfer matrix method. A general technique for analyzing layered piezoelectric resonators under thickness and lateral field excitation is presented and is applied to the study of zinc oxi...