Exact analysis of the propagation of acoustic waves in multilayered anisotropic piezoelectric plates

• Published in: IEEE transactions on ultrasonics, ferroelectrics, and frequency control Vol. 41; no. 3; pp. 375 - 390
• Main Authors: Stewart, J.T., Yong, Y.-K.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01.05.1994; Institute of Electrical and Electronics Engineers
• Subjects: Acoustic propagation; Acoustic wave devices, piezoelectric and piezoresistive devices; Acoustic waves; Acoustics; Anisotropic magnetoresistance; Applied sciences; Conducting materials; Electrodes; Electronics; Exact sciences and technology; Fundamental areas of phenomenology (including applications); Performance analysis; Physics; Piezoelectric films; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Semiconductor thin films; Silicon; Ultrasonics, quantum acoustics, and physical effects of sound; Zinc oxide; Acoustic wave device; Wave propagation; Numerical solution; Transfer matrix method; Piezoelectricity; Layered materials; Plates
• DOI: 10.1109/58.285473
• ISSN: 0885-3010

Exact analysis of the propagation of acoustic waves in multilayered piezoelectric plates is performed using the transfer matrix method. A general technique for analyzing layered piezoelectric resonators under thickness and lateral field excitation is presented and is applied to the study of zinc oxide on silicon thin film resonators. Both one and two-dimensional analysis with general material anisotropy is performed, and a simplified method for incorporating thin conducting electrodes on the plate's free surfaces is presented. The general methodology described is summarized into efficient algorithms to aid in the implementation of the procedures and some computational aspects are discussed. Results are presented for cutoff behavior as well as general dispersion characteristics for two and three layered plates.< >