Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering
Zinc nitride films were prepared on quartz substrates by rf magnetron sputtering using pure zinc target in N2–Ar plasma. X-ray diffraction (XRD) analysis indicates that the films just after deposition are polycrystalline with a cubic structure and a preferred orientation of (400). X-ray photoelectro...
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| Published in | Applied surface science Vol. 255; no. 6; pp. 3544 - 3547 |
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| Main Authors | , , , , , , , |
| Format | Journal Article |
| Language | English |
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Elsevier B.V
01.01.2009
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| Abstract | Zinc nitride films were prepared on quartz substrates by rf magnetron sputtering using pure zinc target in N2–Ar plasma. X-ray diffraction (XRD) analysis indicates that the films just after deposition are polycrystalline with a cubic structure and a preferred orientation of (400). X-ray photoelectron spectroscopy (XPS) analysis also confirms the formation of N–Zn bonds and the substitution incorporation of oxygen for nitrogen on the surface of the films. The optical band gap is calculated from the transmittance spectra of films just after deposition, and a direct band gap of 1.01±0.02eV is obtained. Room temperature PL measurement is also performed to investigate the effect of defect on the band gap and quality of the zinc nitride films. |
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| AbstractList | Zinc nitride films were prepared on quartz substrates by rf magnetron sputtering using pure zinc target in N2-Ar plasma. X-ray diffraction (XRD) analysis indicates that the films just after deposition are polycrystalline with a cubic structure and a preferred orientation of (4 0 0). X-ray photoelectron spectroscopy (XPS) analysis also confirms the formation of N-Zn bonds and the substitution incorporation of oxygen for nitrogen on the surface of the films. The optical band gap is calculated from the transmittance spectra of films just after deposition, and a direct band gap of 1.01 +/- 0.02 eV is obtained. Room temperature PL measurement is also performed to investigate the effect of defect on the band gap and quality of the zinc nitride films. Zinc nitride films were prepared on quartz substrates by rf magnetron sputtering using pure zinc target in N2–Ar plasma. X-ray diffraction (XRD) analysis indicates that the films just after deposition are polycrystalline with a cubic structure and a preferred orientation of (400). X-ray photoelectron spectroscopy (XPS) analysis also confirms the formation of N–Zn bonds and the substitution incorporation of oxygen for nitrogen on the surface of the films. The optical band gap is calculated from the transmittance spectra of films just after deposition, and a direct band gap of 1.01±0.02eV is obtained. Room temperature PL measurement is also performed to investigate the effect of defect on the band gap and quality of the zinc nitride films. |
| Author | Yang, Tianlin Zhang, Zhisheng Li, Yanhui Wu, Zhongchen Lv, MaoShui Yan, Jincheng Han, Shenghao Song, Shumei |
| Author_xml | – sequence: 1 givenname: Tianlin surname: Yang fullname: Yang, Tianlin email: ytlin@sdu.edu.cn, lvmaoshui@sdu.edu.cn organization: School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, PR China – sequence: 2 givenname: Zhisheng surname: Zhang fullname: Zhang, Zhisheng organization: School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, PR China – sequence: 3 givenname: Yanhui surname: Li fullname: Li, Yanhui organization: Department of Space Science and Applied Physics, Shandong University at Weihai, Wenhua West Road 180, Weihai 264209, Shandong, PR China – sequence: 4 givenname: MaoShui surname: Lv fullname: Lv, MaoShui organization: Department of Space Science and Applied Physics, Shandong University at Weihai, Wenhua West Road 180, Weihai 264209, Shandong, PR China – sequence: 5 givenname: Shumei surname: Song fullname: Song, Shumei organization: Department of Space Science and Applied Physics, Shandong University at Weihai, Wenhua West Road 180, Weihai 264209, Shandong, PR China – sequence: 6 givenname: Zhongchen surname: Wu fullname: Wu, Zhongchen organization: Department of Space Science and Applied Physics, Shandong University at Weihai, Wenhua West Road 180, Weihai 264209, Shandong, PR China – sequence: 7 givenname: Jincheng surname: Yan fullname: Yan, Jincheng organization: Department of Space Science and Applied Physics, Shandong University at Weihai, Wenhua West Road 180, Weihai 264209, Shandong, PR China – sequence: 8 givenname: Shenghao surname: Han fullname: Han, Shenghao organization: Department of Space Science and Applied Physics, Shandong University at Weihai, Wenhua West Road 180, Weihai 264209, Shandong, PR China |
| BookMark | eNp9kD9PwzAQxS1UJNrCN2DwxJZwiZPYWZBQxT-pEgMwMViufalcpU6wHaTy6XFVZqa70_3e091bkJkbHBJyXUBeQNHc7nI1hinovAQQOfC8LOCMzAvBWVbXopqRecLarGKsvCCLEHYARZm2c_L5Fv2k4-RVT5UzdBij1akf_TCijxYDHTr6Y52mzkZvDdLO9vuQAByVR0M3B-o7uldbh9EPjoZxihG9ddtLct6pPuDVX12Sj8eH99Vztn59elndrzNdAYtZ04gSmsJsWtFyoWqTJt5UHbS14LUwggld1YC6MbzboOGt5qaFUjNWN6ZlbEluTr7p6K8JQ5R7GzT2vXI4TEGysuXQAE9gdQK1H0Lw2MnR273yB1mAPCYpd_KUpDwmKYHLlGSS3Z1kmJ74tuhl0BadRmM96ijNYP83-AVrUIE5 |
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| ContentType | Journal Article |
| Copyright | 2008 |
| Copyright_xml | – notice: 2008 |
| DBID | AAYXX CITATION 7SR 7U5 8BQ 8FD JG9 L7M |
| DOI | 10.1016/j.apsusc.2008.07.210 |
| DatabaseName | CrossRef Engineered Materials Abstracts Solid State and Superconductivity Abstracts METADEX Technology Research Database Materials Research Database Advanced Technologies Database with Aerospace |
| DatabaseTitle | CrossRef Materials Research Database Engineered Materials Abstracts Solid State and Superconductivity Abstracts Technology Research Database Advanced Technologies Database with Aerospace METADEX |
| DatabaseTitleList | Materials Research Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1873-5584 |
| EndPage | 3547 |
| ExternalDocumentID | 10_1016_j_apsusc_2008_07_210 S0169433208021089 |
| GroupedDBID | --K --M -~X .~1 0R~ 1B1 1RT 1~. 1~5 23M 4.4 457 4G. 5GY 5VS 6J9 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AARLI AAXUO ABFNM ABFRF ABJNI ABMAC ABNEU ABXDB ABXRA ABYKQ ACBEA ACDAQ ACFVG ACGFO ACGFS ACNNM ACRLP ADBBV ADECG ADEZE ADMUD AEBSH AEFWE AEKER AENEX AEZYN AFKWA AFRZQ AFTJW AFZHZ AGHFR AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV AJSZI ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ AXJTR BKOJK BLXMC CS3 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FIRID FLBIZ FNPLU FYGXN G-Q HZ~ IHE J1W KOM M24 M38 M41 MAGPM MO0 N9A O-L O9- OAUVE OGIMB OZT P-9 P2P PC. Q38 RIG RNS ROL RPZ SCB SDF SDG SDP SES SMS SPC SPCBC SPD SPG SSK SSM SSQ SSZ T5K TN5 WH7 XFK XPP ZMT ~02 ~G- AAQXK AAXKI AAYXX AFJKZ AKRWK ASPBG AVWKF AZFZN BBWZM CITATION FEDTE FGOYB G-2 GBLVA HMV HVGLF NDZJH P-8 R2- SEW WUQ 7SR 7U5 8BQ 8FD JG9 L7M |
| ID | FETCH-LOGICAL-c403t-6682061db98978a5d206764f0958758d838c450ec6d7fbed79c7d902c3356d933 |
| IEDL.DBID | .~1 |
| ISSN | 0169-4332 |
| IngestDate | Fri Oct 25 04:13:10 EDT 2024 Fri Sep 27 00:21:38 EDT 2024 Fri Feb 23 02:30:49 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 6 |
| Keywords | Optical band gap Zinc nitride 68.55.Jk 73.61.Le rf magnetron sputtering |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c403t-6682061db98978a5d206764f0958758d838c450ec6d7fbed79c7d902c3356d933 |
| Notes | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
| PQID | 32970607 |
| PQPubID | 23500 |
| PageCount | 4 |
| ParticipantIDs | proquest_miscellaneous_32970607 crossref_primary_10_1016_j_apsusc_2008_07_210 elsevier_sciencedirect_doi_10_1016_j_apsusc_2008_07_210 |
| PublicationCentury | 2000 |
| PublicationDate | 2009-01-01 2009-1-00 20090101 |
| PublicationDateYYYYMMDD | 2009-01-01 |
| PublicationDate_xml | – month: 01 year: 2009 text: 2009-01-01 day: 01 |
| PublicationDecade | 2000 |
| PublicationTitle | Applied surface science |
| PublicationYear | 2009 |
| Publisher | Elsevier B.V |
| Publisher_xml | – name: Elsevier B.V |
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| SSID | ssj0012873 |
| Score | 2.1535804 |
| Snippet | Zinc nitride films were prepared on quartz substrates by rf magnetron sputtering using pure zinc target in N2–Ar plasma. X-ray diffraction (XRD) analysis... Zinc nitride films were prepared on quartz substrates by rf magnetron sputtering using pure zinc target in N2-Ar plasma. X-ray diffraction (XRD) analysis... |
| SourceID | proquest crossref elsevier |
| SourceType | Aggregation Database Publisher |
| StartPage | 3544 |
| SubjectTerms | Optical band gap rf magnetron sputtering Zinc nitride |
| Title | Structural and optical properties of zinc nitride films prepared by rf magnetron sputtering |
| URI | https://dx.doi.org/10.1016/j.apsusc.2008.07.210 https://search.proquest.com/docview/32970607 |
| Volume | 255 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3NS8MwFA9jXvQgfuL8mDl47dY1bdoex1Cm4i5zMPAQmo9KxbVlmwc9-Lf7XtqKiiB4LWkIL8kv77283y-EXERuYsCNhtjED5jje4Y70iTGcU3KIm0VxpA7fDfh45l_Mw_mLTJquDBYVlljf4XpFq3rL_3amv0yy_pT1BFB9S1kiw7cCEl8KLYFa7r3_lnmAfBb3TJDY2QHeQ19ztZ4JRCJrlRdURn2POTR_n48_QBqe_pc7ZDt2m2kw2pku6Rl8j2y9UVMcJ88TK0ULMpo0CTXtChtmpqWmG5fom4qLVL6luWKwjZeZtrQNHterKCBsWXoVL7SZUoXyWNuMEFOV6V9xRp6PyCzq8v70dipn05wlO-ytcM56rIPtIwjCBOTQKNKO_dTcKggQIl0xCLlB65RXIepNDqMVahj11OMBVzHjB2Sdl7k5ohQV0lXGt9wCIx8ruJYRnKgOETOgA5h7HWI01hMlJVChmhKx55EZeH6sctQgIU7JGzMKr7NtAAQ_-PP82YWBGwCvNlIclO8rATzYlQBCo__3fcJ2azuiTC5ckraMGPmDNyNteza9dQlG8Pr2_HkAzRa1TQ |
| link.rule.ids | 315,783,787,4511,24130,27938,27939,45599,45693 |
| linkProvider | Elsevier |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8NAEF5qe1AP4hPrq3vwGptmk032WIqltY9LWyh4WLKPSMQmoa0H_fXO5iEqguA1JEuY2Z2dbx7fIHQb2KEGNxqwiesRy3U0tYQOtWXriAQqZxgzvcOTKR0s3Ielt6yhXtULY8oqS9tf2PTcWpdP2qU021kct2eGR8Swb5lu0Y4dsB3UAG-AwWZvdIejwfQzmQCggBQU38w0CDlVB11e5hUCGN3IsqjSv3NMK-3vN9QPW51fQP1DdFB6jrhb_NwRqunkGO1_4RM8QY-znA3WMGngMFE4zfJINc5MxH1tqFNxGuH3OJEYTvI6VhpH8ctqAy_ovBIdize8jvAqfEq0iZHjTZYPsobVT9Gifz_vDaxyeoIlXZtsLUoNNXtHCRYAUgw9ZYjaqRuBTwUYJVABCaTr2VpS5UdCK59JXzHbkYR4VDFCzlA9SRN9jrAthS20qylgI5dKxkQgOpICeAYD4TOniaxKYjwrSDJ4VT32zAsJl_MufQ4SbiK_Eiv_pmwOdvyPL1uVFjicA5PcCBOdvm44cZghAvIv_r12C-0O5pMxHw-no0u0V6SNTKzlCtVBe_oavI-tuCl31wesAtfx |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Structural+and+optical+properties+of+zinc+nitride+films+prepared+by+rf+magnetron+sputtering&rft.jtitle=Applied+surface+science&rft.au=Yang%2C+Tianlin&rft.au=Zhang%2C+Zhisheng&rft.au=Li%2C+Yanhui&rft.au=Lv%2C+MaoShui&rft.date=2009-01-01&rft.issn=0169-4332&rft.volume=255&rft.issue=6&rft.spage=3544&rft.epage=3547&rft_id=info:doi/10.1016%2Fj.apsusc.2008.07.210&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_j_apsusc_2008_07_210 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0169-4332&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0169-4332&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0169-4332&client=summon |