Multifractal analysis of textured silicon surfaces

• Published in: Applied surface science Vol. 301; pp. 46 - 50
• Main Authors: Jurečka, Stanislav, Angermann, Heike, Kobayashi, Hikaru, Takahashi, Masao, Pinčík, Emil
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Amsterdam Elsevier B.V 15.05.2014; Elsevier
• Subjects: Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Fractals; Optical properties; Physics; Semiconductors; Texture; Fractals; Semiconductors; Texture; Optical properties; Silicon; Semiconductor materials

•We prepared pyramidal textures at Si with different shape distributions.•The texture morphology properties were examined by statistical and fractal methods based on the AFM images.•Optical properties were studied by the spectral reflectance in 3D arrangement.•General fractal dimension, multifractal...