Effect of substrate temperature on the structural and optical properties of ZnO and Al-doped ZnO thin films prepared by dc magnetron sputtering - Li, Xue-Yong; Li, Hong-Jian; Wang, Zhi-Jun; Xia, Hui; Xiong, Zhi-Yong; Wang, Jun-Xi; Yang, Bing-Chu (Optics communications, 2009)
Keywords: Al-doped ZnO; Condensed matter: electronic structure, electrical, magnetic, and optical properties; dc Magnetron sputtering; Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures; Electronic transport in interface structures; Exact sciences and technology; Ii-vi semiconductors; Microstructure; Optical properties; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Other semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions; Photoluminescence; Physics; 71.55.Gs; 73.40.Lq; Optical properties; Al-doped ZnO; Microstructure; dc Magnetron sputtering; 61.72.Vv; Surface morphology; Photoluminescence; Doped materials; Measuring methods; Binary compounds; Zinc Oxides; Ceramics; XRD; Sensor materials; Transmittance; Al-doped; Thin films; Aluminium Oxides; II-VI semiconductors; Aluminium additions; Optical method; 71.55.Cs