Impacts of Vertically Stacked Monolithic 3D-IC Process on Characteristics of Underlying Thin-Film Transistor - Ma, William Cheng-Yu; Huang, Yan-Jia; Chen, Po-Jen; Jhu, Jhe-Wei; Chang, Yan-Shiuan; Chang, Ting-Hsuan (IEEE journal of the Electron Devices Society, 2020)
Keywords: Etching; Fabrication; Integrated circuits; Lithography; Logic gates; low power; Monolithic 3D-IC; nanosheet channel; Performance degradation; Polysilicon; Semiconductor devices; Silicon; Thin film transistors; thin-film transistor; Threshold voltage