Iron silicide thin film formation at low temperatures
The rate kinetics of the formation of compound phases from thin layers of 1000–1500 Å α-Fe deposited onto single-crystal Si have been studied by MeV 4He + backscattering spectrometry. Si is observed to dissolve into the thin α-Fe layer before compound formation. A compound layer of FeSi is produced...
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| Published in | Thin solid films Vol. 25; no. 2; pp. 415 - 422 |
|---|---|
| Main Authors | , , , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier B.V
01.02.1975
|
| Online Access | Get full text |
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| Abstract | The rate kinetics of the formation of compound phases from thin layers of 1000–1500 Å α-Fe deposited onto single-crystal Si have been studied by MeV
4He
+ backscattering spectrometry. Si is observed to dissolve into the thin α-Fe layer before compound formation. A compound layer of FeSi is produced at about 450°C and FeSi
2 formation begins at about 550°C. The (100) surface of Si is slightly more reactive than the (111) surface. An inert diffusion marker of implanted Xe was used to investigate the relative movement of the two species.
X-ray diffractometry identifies the structure of the compound species as identical to bulk FeSi and FeSi
2. The compounds formed on both (111) n-Si and (100) n-Si are apparently polycrystalline and untextured. |
|---|---|
| AbstractList | The rate kinetics of the formation of compound phases from thin layers of 1000–1500 Å α-Fe deposited onto single-crystal Si have been studied by MeV
4He
+ backscattering spectrometry. Si is observed to dissolve into the thin α-Fe layer before compound formation. A compound layer of FeSi is produced at about 450°C and FeSi
2 formation begins at about 550°C. The (100) surface of Si is slightly more reactive than the (111) surface. An inert diffusion marker of implanted Xe was used to investigate the relative movement of the two species.
X-ray diffractometry identifies the structure of the compound species as identical to bulk FeSi and FeSi
2. The compounds formed on both (111) n-Si and (100) n-Si are apparently polycrystalline and untextured. |
| Author | Lau, S.S. Feng, J.S.-Y. Olowolafe, J.O. Nicolet, M.-A. |
| Author_xml | – sequence: 1 givenname: S.S. surname: Lau fullname: Lau, S.S. – sequence: 2 givenname: J.S.-Y. surname: Feng fullname: Feng, J.S.-Y. – sequence: 3 givenname: J.O. surname: Olowolafe fullname: Olowolafe, J.O. – sequence: 4 givenname: M.-A. surname: Nicolet fullname: Nicolet, M.-A. |
| BookMark | eNp9kMFKAzEURYNUsK3-gYtZiS5GXybJZLIRpFQtFNzoOqSZF4zMTGqSKv69UysuXb3FPffCOzMyGcKAhJxTuKZA6xsADmUNCi6luFIAQpVwRKa0kaqsJKMTMv1DTsgspTcAoFXFpkSsYhiK5DtvfYtFfvVD4XzXFy7E3mQ_hiYXXfgsMvZbjCbvIqZTcuxMl_Ds987Jy_3yefFYrp8eVou7dWk50FxKaRStHAexqRXjtZFUtFADs0pAUzEjatc2doObxjVGOhRIG9E4hhZcLVo2JxeH3W0M7ztMWfc-Wew6M2DYJV1VnDPG1QjyA2hjSCmi09voexO_NAW9d6T3AvRegJZC_zjSMNZuDzUcn_jwGHWyHgeLrY9os26D_3_gGxAqbnY |
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| Cites_doi | 10.1016/0040-6090(74)90241-7 10.1002/pssa.2210150128 10.1016/0038-1101(73)90063-4 10.1016/0040-6090(73)90112-0 10.1016/0040-6090(73)90063-1 10.1016/0040-6090(75)90057-7 10.1016/0040-6090(73)90002-3 10.1016/0040-6090(75)90058-9 |
| ContentType | Journal Article |
| Copyright | 1975 |
| Copyright_xml | – notice: 1975 |
| DBID | AAYXX CITATION 8BQ 8FD JG9 |
| DOI | 10.1016/0040-6090(75)90059-0 |
| DatabaseName | CrossRef METADEX Technology Research Database Materials Research Database |
| DatabaseTitle | CrossRef Materials Research Database Technology Research Database METADEX |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering Physics |
| EISSN | 1879-2731 |
| EndPage | 422 |
| ExternalDocumentID | 10_1016_0040_6090_75_90059_0 0040609075900590 |
| GroupedDBID | --K --M -~X .DC .~1 0R~ 123 1B1 1RT 1~. 1~5 29Q 4.4 457 4G. 5VS 6TJ 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXUO AAYJJ ABFNM ABFRF ABJNI ABMAC ABNEU ABXDB ABXRA ABYKQ ACBEA ACDAQ ACFVG ACGFO ACGFS ACNNM ACRLP ADBBV ADEZE ADMUD AEBSH AEFWE AEKER AENEX AEZYN AFFNX AFKWA AFRZQ AFTJW AGHFR AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ ASPBG AVWKF AXJTR AZFZN BBWZM BKOJK BLXMC CS3 DU5 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q G8K GBLVA HMV HVGLF HX~ HZ~ IHE J1W KOM M24 M38 M41 MAGPM MO0 N9A NDZJH O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 R2- RIG RNS ROL RPZ SDF SDG SDP SES SEW SMS SPC SPCBC SPD SPG SSM SSQ SSZ T5K TWZ VOH WH7 WUQ XFK ZMT ~G- AAXKI AAYXX AFJKZ AKRWK CITATION 8BQ 8FD JG9 |
| ID | FETCH-LOGICAL-c401t-77a912f405b69346a715d0603c950823a56fd8cbeb8f8a7fe5e1858f3ec0f65d3 |
| ISSN | 0040-6090 |
| IngestDate | Fri Aug 16 22:49:03 EDT 2024 Thu Sep 26 19:10:16 EDT 2024 Fri Feb 23 02:16:52 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 2 |
| Language | English |
| LinkModel | OpenURL |
| MergedId | FETCHMERGED-LOGICAL-c401t-77a912f405b69346a715d0603c950823a56fd8cbeb8f8a7fe5e1858f3ec0f65d3 |
| Notes | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
| PQID | 22443349 |
| PQPubID | 23500 |
| PageCount | 8 |
| ParticipantIDs | proquest_miscellaneous_22443349 crossref_primary_10_1016_0040_6090_75_90059_0 elsevier_sciencedirect_doi_10_1016_0040_6090_75_90059_0 |
| PublicationCentury | 1900 |
| PublicationDate | 19750201 |
| PublicationDateYYYYMMDD | 1975-02-01 |
| PublicationDate_xml | – month: 02 year: 1975 text: 19750201 day: 01 |
| PublicationDecade | 1970 |
| PublicationTitle | Thin solid films |
| PublicationYear | 1975 |
| Publisher | Elsevier B.V |
| Publisher_xml | – name: Elsevier B.V |
| References | Frank (BIB9) 1973; 15 Chu, Lau, Mayer, Müller, Tu (BIB11) 1975; 25 Hutchins, Shepala (BIB4) 1973; 18 Bower, Sigurd, Scott (BIB3) 1973; 16 Tu, Alessandrin, Chu, Krautle, Mayer (BIB2) March 1974 Hansen, Anderko (BIB1) 1958 Ziegler, Chu (BIB8) 1973; 19 Tu, Chu, Mayer (BIB10) 1975; 25 Chu, Mayer, Nicolet, Buck, Amsel, Eisen (BIB5) 1973; 17 Read (BIB6) November 1964 Lau, Chu, Mayer, Tu (BIB7) 1974; 23 Hansen (10.1016/0040-6090(75)90059-0_BIB1) 1958 Tu (10.1016/0040-6090(75)90059-0_BIB2) 1974 Ziegler (10.1016/0040-6090(75)90059-0_BIB8) 1973; 19 Lau (10.1016/0040-6090(75)90059-0_BIB7) 1974; 23 Frank (10.1016/0040-6090(75)90059-0_BIB9) 1973; 15 Bower (10.1016/0040-6090(75)90059-0_BIB3) 1973; 16 Hutchins (10.1016/0040-6090(75)90059-0_BIB4) 1973; 18 Chu (10.1016/0040-6090(75)90059-0_BIB11) 1975; 25 Chu (10.1016/0040-6090(75)90059-0_BIB5) 1973; 17 Tu (10.1016/0040-6090(75)90059-0_BIB10) 1975; 25 Read (10.1016/0040-6090(75)90059-0_BIB6) 1964 |
| References_xml | – start-page: 713 year: 1958 ident: BIB1 article-title: Constitution of Binary Alloys contributor: fullname: Anderko – volume: 18 start-page: 343 year: 1973 ident: BIB4 publication-title: Thin Solid Films contributor: fullname: Shepala – volume: 17 start-page: 1 year: 1973 ident: BIB5 publication-title: Thin Solid Films contributor: fullname: Eisen – volume: 19 start-page: 281 year: 1973 ident: BIB8 publication-title: Thin Solid Films contributor: fullname: Chu – volume: 15 start-page: 251 year: 1973 ident: BIB9 publication-title: Phys. Status Solidi (a) contributor: fullname: Frank – volume: 25 start-page: 393 year: 1975 ident: BIB11 publication-title: Thin Solid Films contributor: fullname: Tu – volume: 25 start-page: 403 year: 1975 ident: BIB10 publication-title: Thin Solid Films contributor: fullname: Mayer – volume: 16 start-page: 1461 year: 1973 ident: BIB3 publication-title: Solid State Electron. contributor: fullname: Scott – year: March 1974 ident: BIB2 publication-title: 6th Int. Vacuum Congr. contributor: fullname: Mayer – volume: 23 start-page: 205 year: 1974 ident: BIB7 publication-title: Thin Solid Films contributor: fullname: Tu – year: November 1964 ident: BIB6 publication-title: 27th Annu. Pittsburgh Diffraction Conf. contributor: fullname: Read – volume: 23 start-page: 205 year: 1974 ident: 10.1016/0040-6090(75)90059-0_BIB7 publication-title: Thin Solid Films doi: 10.1016/0040-6090(74)90241-7 contributor: fullname: Lau – volume: 15 start-page: 251 year: 1973 ident: 10.1016/0040-6090(75)90059-0_BIB9 publication-title: Phys. Status Solidi (a) doi: 10.1002/pssa.2210150128 contributor: fullname: Frank – volume: 16 start-page: 1461 year: 1973 ident: 10.1016/0040-6090(75)90059-0_BIB3 publication-title: Solid State Electron. doi: 10.1016/0038-1101(73)90063-4 contributor: fullname: Bower – volume: 18 start-page: 343 year: 1973 ident: 10.1016/0040-6090(75)90059-0_BIB4 publication-title: Thin Solid Films doi: 10.1016/0040-6090(73)90112-0 contributor: fullname: Hutchins – volume: 19 start-page: 281 year: 1973 ident: 10.1016/0040-6090(75)90059-0_BIB8 publication-title: Thin Solid Films doi: 10.1016/0040-6090(73)90063-1 contributor: fullname: Ziegler – volume: 25 start-page: 393 year: 1975 ident: 10.1016/0040-6090(75)90059-0_BIB11 publication-title: Thin Solid Films doi: 10.1016/0040-6090(75)90057-7 contributor: fullname: Chu – year: 1974 ident: 10.1016/0040-6090(75)90059-0_BIB2 contributor: fullname: Tu – volume: 17 start-page: 1 year: 1973 ident: 10.1016/0040-6090(75)90059-0_BIB5 publication-title: Thin Solid Films doi: 10.1016/0040-6090(73)90002-3 contributor: fullname: Chu – year: 1964 ident: 10.1016/0040-6090(75)90059-0_BIB6 contributor: fullname: Read – volume: 25 start-page: 403 year: 1975 ident: 10.1016/0040-6090(75)90059-0_BIB10 publication-title: Thin Solid Films doi: 10.1016/0040-6090(75)90058-9 contributor: fullname: Tu – start-page: 713 year: 1958 ident: 10.1016/0040-6090(75)90059-0_BIB1 article-title: Constitution of Binary Alloys contributor: fullname: Hansen |
| SSID | ssj0001223 |
| Score | 1.3592411 |
| Snippet | The rate kinetics of the formation of compound phases from thin layers of 1000–1500 Å α-Fe deposited onto single-crystal Si have been studied by MeV
4He
+... |
| SourceID | proquest crossref elsevier |
| SourceType | Aggregation Database Publisher |
| StartPage | 415 |
| Title | Iron silicide thin film formation at low temperatures |
| URI | https://dx.doi.org/10.1016/0040-6090(75)90059-0 https://search.proquest.com/docview/22443349 |
| Volume | 25 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3NaxUxEA_aIuhBtCq2fu1BQZGs2c0m2RwfolRrLWiL9RQ22QQW6rb07bv41zvZbLKP-lkvy2MeGULmx8xvkpkEoaetBcZmZI2dZC2urHS4rjXBwpbAlxvHuPaJ4v5HvntUvT9mx_OFCmN3yaBz8_2XfSX_Y1WQgV19l-wlLJuUggB-g33hCxaG7z_Z-N052G7ZnXSmay1QyK739yx9mzsSfaviiX80zgI7DrcnL9fpqH-18yXMsWvHgYlff2hW47Zo_jmfueJUuwsy_DWJD0A9ZMcubMXnB-mPEWLhpGM_x4t83l4opGCxInl2mb4_gIQ3PaPLDL3KEzTKNf9Xhd7MKZRWoeX4Jy8dNgySZqDSgj3zcRG4HiZzZIqn8RcCViojjBVqXpPympRgatSiyFW0WYLvAae3udj79GUvheeiLFMppR8T-ykL_irJngv2YprN7_jKhcg90pHDW-jmlEdkiwCK2-iK7bfQjbXbJbfQtbG61yzvIOaBkkWgZB4ombd3loCSNUMGlszWgXIXHb19c_h6F0_vZWADWfIAiVIji9IBBddc0oo3omAt4YQa_9RvSRvGXVsbbXXt6kY4yyywtdpRa4jjrKX30EZ_2tv7KHNOaG2lP_MF-kIbaTTwPldSJwmtOdlGOK6KOgvXoqg_WWMbibh0aqJ2gbIpwMRfRj6JK63A8_njrKa3p6ulAvJZUVrJnUvO5QG6PgP9IdoYzlf2ETDLQT-esPIDVFZsaA |
| link.rule.ids | 315,783,787,27936,27937 |
| linkProvider | Library Specific Holdings |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Iron+silicide+thin+film+formation+at+low+temperatures&rft.jtitle=Thin+solid+films&rft.au=Lau%2C+S.S.&rft.au=Feng%2C+J.S.-Y.&rft.au=Olowolafe%2C+J.O.&rft.au=Nicolet%2C+M.-A.&rft.date=1975-02-01&rft.issn=0040-6090&rft.volume=25&rft.issue=2&rft.spage=415&rft.epage=422&rft_id=info:doi/10.1016%2F0040-6090%2875%2990059-0&rft.externalDBID=n%2Fa&rft.externalDocID=10_1016_0040_6090_75_90059_0 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0040-6090&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0040-6090&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0040-6090&client=summon |