Investigation of morphological and optical properties of nanostructured layers formed by the SSCT etching of silicon

• Published in: Applied Surface Science Vol. 461; pp. 72 - 77
• Main Authors: Jurečka, Stanislav, Imamura, Kentaro, Matsumoto, Taketoshi, Kobayashi, Hikaru
• Format: Journal Article
• Language: English; Japanese
• Published: Elsevier B.V 15.12.2018; Elsevier BV
• Subjects: Effective media approximation; Morphology; Multifractal analysis; Nanostructure; Power spectral density; Raman scattering; Silicon; SSCT layer; Raman scattering; SSCT layer; Morphology; Power spectral density; Silicon; Nanostructure; Effective media approximation; Multifractal analysis

[Display omitted] •Forming of the nanostructured SSCT layers.•Analysis of microstructure by statistical, Abbott-Firestone, Fourier and multifractal methods.•Analysis of density of vibrational states by Raman scattering. Nanostructured layers were formed on silicon substrate by using metal assisted e...