Investigation of morphological and optical properties of nanostructured layers formed by the SSCT etching of silicon
[Display omitted] •Forming of the nanostructured SSCT layers.•Analysis of microstructure by statistical, Abbott-Firestone, Fourier and multifractal methods.•Analysis of density of vibrational states by Raman scattering. Nanostructured layers were formed on silicon substrate by using metal assisted e...
Saved in:
| Published in | Applied Surface Science Vol. 461; pp. 72 - 77 |
|---|---|
| Main Authors | , , , |
| Format | Journal Article |
| Language | English Japanese |
| Published |
Elsevier B.V
15.12.2018
Elsevier BV |
| Subjects | |
| Online Access | Get full text |
Cover
Loading…
| Abstract | [Display omitted]
•Forming of the nanostructured SSCT layers.•Analysis of microstructure by statistical, Abbott-Firestone, Fourier and multifractal methods.•Analysis of density of vibrational states by Raman scattering.
Nanostructured layers were formed on silicon substrate by using metal assisted etching method with different etching times. Microstructural properties of prepared layers were experimentally studied by the electron microscopy methods and analysed by the statistical methods, by the Abbott-Firestone method, by analysis of the power spectral density and by using methods of fractal geometry. Results of microstructure analysis show forming of particle size distribution in the volume of etched layer and its development during the structure preparation. Raman scattering was used for the determination of density of vibrational states related to formed particle size distribution. |
|---|---|
| AbstractList | [Display omitted]
•Forming of the nanostructured SSCT layers.•Analysis of microstructure by statistical, Abbott-Firestone, Fourier and multifractal methods.•Analysis of density of vibrational states by Raman scattering.
Nanostructured layers were formed on silicon substrate by using metal assisted etching method with different etching times. Microstructural properties of prepared layers were experimentally studied by the electron microscopy methods and analysed by the statistical methods, by the Abbott-Firestone method, by analysis of the power spectral density and by using methods of fractal geometry. Results of microstructure analysis show forming of particle size distribution in the volume of etched layer and its development during the structure preparation. Raman scattering was used for the determination of density of vibrational states related to formed particle size distribution. |
| Author | Jurečka, Stanislav Kobayashi, Hikaru Imamura, Kentaro Matsumoto, Taketoshi |
| Author_xml | – sequence: 1 givenname: Stanislav surname: Jurečka fullname: Jurečka, Stanislav email: jurecka@lm.uniza.sk organization: Institute of Aurel Stodola, University of Žilina, Nálepku 1390, 03101 Liptovský Mikuláš, Slovakia – sequence: 2 givenname: Kentaro orcidid: 0000-0001-8355-9472 surname: Imamura fullname: Imamura, Kentaro organization: The Institute of Scientific and Industrial Research, Osaka University, CREST, Japan Science and Technology Agency, Ibaraki, Osaka 567-0047, Japan – sequence: 3 givenname: Taketoshi surname: Matsumoto fullname: Matsumoto, Taketoshi organization: The Institute of Scientific and Industrial Research, Osaka University, CREST, Japan Science and Technology Agency, Ibaraki, Osaka 567-0047, Japan – sequence: 4 givenname: Hikaru surname: Kobayashi fullname: Kobayashi, Hikaru organization: The Institute of Scientific and Industrial Research, Osaka University, CREST, Japan Science and Technology Agency, Ibaraki, Osaka 567-0047, Japan |
| BackLink | https://cir.nii.ac.jp/crid/1873116917952372352$$DView record in CiNii |
| BookMark | eNqFkU1rAyEQhqWk0CTtP-jBQ6-71dXNxh4KJfQjEOgh6VmMO5sYNrqoCeTf10166qGFYXTwfRzmnREaWGcBoXtKckro5HGXqy4cgs4LQqc5SSHEFRrSacWyspzyARommcg4Y8UNGoWwI4QW6XWI4tweIUSzUdE4i12D9853W9e6jdGqxcrW2HXxfO-868BHA6HXWWVdiP6g48FDjVt1Ah9w4_w-VesTjlvAy-VshSHqrbGbngmmNdrZW3TdqDbA3c85Rl9vr6vZR7b4fJ_PXhaZ5oTGjJe8gTWfwJoRTgrgZaO0UEoo1gimGOiKlhQU1UJPOV8zWtZ1ySdcUyoUqdgYPV3-1d6F4KGR2sTzoNEr00pKZO-f3MmLf7L3T5IUQiSY_4I7b_bKn_7DHi6YNSa163O_B5r8p5UoC1YVLOUxer7IIM1_NOBl0Aashtp40FHWzvzd5xv2iJv2 |
| CitedBy_id | crossref_primary_10_1016_j_optlastec_2021_107589 |
| Cites_doi | 10.1103/PhysRevB.8.756 10.1016/S0378-4371(02)01383-3 10.1515/jee-2017-0053 10.1016/j.apsusc.2016.04.059 10.1063/1.4973531 10.1037/a0019098 10.1002/pip.2867 10.1016/j.wear.2007.01.025 10.1364/AO.41.000154 10.1103/PhysRevLett.25.222 |
| ContentType | Journal Article |
| Copyright | 2018 Elsevier B.V. |
| Copyright_xml | – notice: 2018 Elsevier B.V. |
| DBID | RYH AAYXX CITATION |
| DOI | 10.1016/j.apsusc.2018.08.099 |
| DatabaseName | CiNii Complete CrossRef |
| DatabaseTitle | CrossRef |
| DatabaseTitleList | |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1873-5584 |
| EndPage | 77 |
| ExternalDocumentID | 10_1016_j_apsusc_2018_08_099 S0169433218322359 |
| GroupedDBID | --K --M -~X .~1 0R~ 1B1 1RT 1~. 1~5 23M 4.4 457 4G. 5GY 5VS 6J9 7-5 71M 8P~ 9JN AABNK AABXZ AACTN AAEDT AAEDW AAEPC AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AARLI AAXUO ABFNM ABFRF ABJNI ABMAC ABNEU ABXRA ABYKQ ACBEA ACDAQ ACFVG ACGFO ACGFS ACRLP ADBBV ADECG ADEZE AEBSH AEFWE AEKER AENEX AEZYN AFKWA AFRZQ AFTJW AFZHZ AGHFR AGUBO AGYEJ AHHHB AIEXJ AIKHN AITUG AIVDX AJOXV AJSZI ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ AXJTR BKOJK BLXMC CS3 EBS EFJIC EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FIRID FLBIZ FNPLU FYGXN G-Q GBLVA IHE J1W KOM M24 M38 M41 MAGPM MO0 N9A O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 RIG RNS ROL RPZ SCB SDF SDG SDP SES SMS SPC SPCBC SPD SPG SSK SSM SSQ SSZ T5K TN5 WH7 XPP ZMT ~02 ~G- AATTM AAXKI AAYWO ACVFH ADCNI AEIPS AEUPX AFPUW AFXIZ AGCQF AGRNS AIIUN AKBMS AKRWK AKYEP ANKPU RYH SSH AAQXK AAYXX ABWVN ABXDB ACNNM ACRPL ADMUD ADNMO AFJKZ AGQPQ AIGII APXCP ASPBG AVWKF AZFZN BBWZM BNPGV CITATION FEDTE FGOYB G-2 HMV HVGLF HZ~ NDZJH R2- SEW WUQ |
| ID | FETCH-LOGICAL-c401t-454feb46eb30402e45fac9aa9a3f93a3ec7151ea1c9c844b315dd5464c119a073 |
| IEDL.DBID | .~1 |
| ISSN | 0169-4332 |
| IngestDate | Thu Apr 24 23:10:30 EDT 2025 Tue Jul 01 02:09:16 EDT 2025 Thu Jun 26 22:26:21 EDT 2025 Fri Feb 23 02:25:19 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Keywords | Raman scattering SSCT layer Morphology Power spectral density Silicon Nanostructure Effective media approximation Multifractal analysis |
| Language | English Japanese |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c401t-454feb46eb30402e45fac9aa9a3f93a3ec7151ea1c9c844b315dd5464c119a073 |
| ORCID | 0000-0001-8355-9472 |
| PageCount | 6 |
| ParticipantIDs | crossref_citationtrail_10_1016_j_apsusc_2018_08_099 crossref_primary_10_1016_j_apsusc_2018_08_099 nii_cinii_1873116917952372352 elsevier_sciencedirect_doi_10_1016_j_apsusc_2018_08_099 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2018-12-15 |
| PublicationDateYYYYMMDD | 2018-12-15 |
| PublicationDate_xml | – month: 12 year: 2018 text: 2018-12-15 day: 15 |
| PublicationDecade | 2010 |
| PublicationTitle | Applied Surface Science |
| PublicationYear | 2018 |
| Publisher | Elsevier B.V Elsevier BV |
| Publisher_xml | – name: Elsevier B.V – name: Elsevier BV |
| References | Imamura, Irishika, Kobayashi (b0005) 2017; 25 Jurečka, Matsumoto, Imamura, Kobayashi (b0055) 2017; 395 Abbott, Firestone (b0025) 1933; 55 Duparré, Ferre-Borrull, Gliech, Notni, Steinert, Bennett (b0035) 2002; 41 Ihlen, Vereijken (b0050) 2010; 139 Imamura, Onitsuka, Sakae, Kobayashi (b0010) 2017; 68 Kantelhardt, Zschiegner, Koscielny-Bunde, Havlin, Bunde, Stanley (b0045) 2002; 316 Kobliska, Solin (b0065) 1973; 8 Watanabe, Heun, Salviati, Yamamoto (b0070) 2002 R. Boisvert, C. W. Clark, D. Lozier, F. Olver, A special functions handbook for the digital age, Notices of the American Mathematical Society, vol. 58, no. 7, 2011, pp. 905–911. Imamura, Irishika, Kobayashi (b0015) 2017; 121 Shuker, Gammon (b0060) 1970; 25 Levin, Rubin (b0020) 1994 Schmähling, Hamprecht (b0030) 2007; 262 Persson, Albohr, Tartaglino, Volokitin, Tosatti (b0040) 2005; 17 Duparré (10.1016/j.apsusc.2018.08.099_b0035) 2002; 41 Persson (10.1016/j.apsusc.2018.08.099_b0040) 2005; 17 Levin (10.1016/j.apsusc.2018.08.099_b0020) 1994 Abbott (10.1016/j.apsusc.2018.08.099_b0025) 1933; 55 Imamura (10.1016/j.apsusc.2018.08.099_b0015) 2017; 121 Imamura (10.1016/j.apsusc.2018.08.099_b0005) 2017; 25 Kantelhardt (10.1016/j.apsusc.2018.08.099_b0045) 2002; 316 Jurečka (10.1016/j.apsusc.2018.08.099_b0055) 2017; 395 10.1016/j.apsusc.2018.08.099_b0075 Schmähling (10.1016/j.apsusc.2018.08.099_b0030) 2007; 262 Ihlen (10.1016/j.apsusc.2018.08.099_b0050) 2010; 139 Shuker (10.1016/j.apsusc.2018.08.099_b0060) 1970; 25 Watanabe (10.1016/j.apsusc.2018.08.099_b0070) 2002 Kobliska (10.1016/j.apsusc.2018.08.099_b0065) 1973; 8 Imamura (10.1016/j.apsusc.2018.08.099_b0010) 2017; 68 |
| References_xml | – year: 2002 ident: b0070 article-title: Nanoscale Spectroscopy and its Applications to Semiconductor Research – volume: 55 start-page: 569 year: 1933 end-page: 572 ident: b0025 article-title: Specifying surface quality: a method based on accurate measurement and comparison publication-title: Mech. Eng. – reference: R. Boisvert, C. W. Clark, D. Lozier, F. Olver, A special functions handbook for the digital age, Notices of the American Mathematical Society, vol. 58, no. 7, 2011, pp. 905–911. – volume: 17 start-page: R1 year: 2005 end-page: R62 ident: b0040 article-title: On the nature of surface roughness with application to contact mechanics, sealing, rubber friction and adhesion publication-title: J. Phys.: Condens. Matter – year: 1994 ident: b0020 article-title: Statistics for Management – volume: 8 start-page: 756 year: 1973 end-page: 768 ident: b0065 article-title: Temperature dependence of the Raman spectrum and the depolarization spectrum of amorphous As publication-title: Phys. Rew. B – volume: 121 start-page: 013107 year: 2017 ident: b0015 article-title: Mechanism of ultra-low reflectivity for nanocrystalline Si/crystalline Si structure formed by surface structure chemical transfer method publication-title: J. Appl. Phys. – volume: 139 start-page: 436 year: 2010 end-page: 463 ident: b0050 article-title: Interaction dominant dynamics in human cognition: beyond 1/fα fluctuations publication-title: J. Exp. Psychol. Gen. – volume: 316 start-page: 87 year: 2002 end-page: 114 ident: b0045 article-title: Multifractal detrended fluctuation analysis of nonstationary timeseries publication-title: Physica A – volume: 395 start-page: 150 year: 2017 end-page: 156 ident: b0055 publication-title: Appl. Surf. Sci. – volume: 25 start-page: 358 year: 2017 end-page: 366 ident: b0005 article-title: Surface nanocrystalline Si structure for highly efficient crystalline Si solar cells publication-title: Prog. Photovoltaics – volume: 68 start-page: 37 year: 2017 ident: b0010 article-title: High conversion efficiency of crystalline Si solar solar cells using black-Si fabricated by SSCT method publication-title: J. Elect. Eng. – volume: 262 start-page: 1360 year: 2007 end-page: 1371 ident: b0030 article-title: Generalizing the Abbott-Firestone curve by two new surface descriptors publication-title: Wear – volume: 41 start-page: 154 year: 2002 end-page: 171 ident: b0035 article-title: Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components publication-title: Appl. Opt. – volume: 25 start-page: 222 year: 1970 end-page: 322 ident: b0060 article-title: Raman-scattering selection-rule breaking and the density of states in amorphous materials publication-title: Phys. Rew. Lett. – volume: 55 start-page: 569 year: 1933 ident: 10.1016/j.apsusc.2018.08.099_b0025 article-title: Specifying surface quality: a method based on accurate measurement and comparison publication-title: Mech. Eng. – volume: 8 start-page: 756 issue: 2 year: 1973 ident: 10.1016/j.apsusc.2018.08.099_b0065 article-title: Temperature dependence of the Raman spectrum and the depolarization spectrum of amorphous As2S3 publication-title: Phys. Rew. B doi: 10.1103/PhysRevB.8.756 – year: 2002 ident: 10.1016/j.apsusc.2018.08.099_b0070 – volume: 316 start-page: 87 year: 2002 ident: 10.1016/j.apsusc.2018.08.099_b0045 article-title: Multifractal detrended fluctuation analysis of nonstationary timeseries publication-title: Physica A doi: 10.1016/S0378-4371(02)01383-3 – volume: 68 start-page: 37 year: 2017 ident: 10.1016/j.apsusc.2018.08.099_b0010 article-title: High conversion efficiency of crystalline Si solar solar cells using black-Si fabricated by SSCT method publication-title: J. Elect. Eng. doi: 10.1515/jee-2017-0053 – volume: 395 start-page: 150 year: 2017 ident: 10.1016/j.apsusc.2018.08.099_b0055 publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2016.04.059 – ident: 10.1016/j.apsusc.2018.08.099_b0075 – volume: 121 start-page: 013107 year: 2017 ident: 10.1016/j.apsusc.2018.08.099_b0015 article-title: Mechanism of ultra-low reflectivity for nanocrystalline Si/crystalline Si structure formed by surface structure chemical transfer method publication-title: J. Appl. Phys. doi: 10.1063/1.4973531 – volume: 139 start-page: 436 year: 2010 ident: 10.1016/j.apsusc.2018.08.099_b0050 article-title: Interaction dominant dynamics in human cognition: beyond 1/fα fluctuations publication-title: J. Exp. Psychol. Gen. doi: 10.1037/a0019098 – volume: 25 start-page: 358 year: 2017 ident: 10.1016/j.apsusc.2018.08.099_b0005 article-title: Surface nanocrystalline Si structure for highly efficient crystalline Si solar cells publication-title: Prog. Photovoltaics doi: 10.1002/pip.2867 – volume: 262 start-page: 1360 year: 2007 ident: 10.1016/j.apsusc.2018.08.099_b0030 article-title: Generalizing the Abbott-Firestone curve by two new surface descriptors publication-title: Wear doi: 10.1016/j.wear.2007.01.025 – year: 1994 ident: 10.1016/j.apsusc.2018.08.099_b0020 – volume: 41 start-page: 154 year: 2002 ident: 10.1016/j.apsusc.2018.08.099_b0035 article-title: Surface characterization techniques for determining the root-mean-square roughness and power spectral densities of optical components publication-title: Appl. Opt. doi: 10.1364/AO.41.000154 – volume: 17 start-page: R1 year: 2005 ident: 10.1016/j.apsusc.2018.08.099_b0040 article-title: On the nature of surface roughness with application to contact mechanics, sealing, rubber friction and adhesion publication-title: J. Phys.: Condens. Matter – volume: 25 start-page: 222 issue: 4 year: 1970 ident: 10.1016/j.apsusc.2018.08.099_b0060 article-title: Raman-scattering selection-rule breaking and the density of states in amorphous materials publication-title: Phys. Rew. Lett. doi: 10.1103/PhysRevLett.25.222 |
| SSID | ssj0012873 ssib006543952 ssib017383081 |
| Score | 2.2647734 |
| Snippet | [Display omitted]
•Forming of the nanostructured SSCT layers.•Analysis of microstructure by statistical, Abbott-Firestone, Fourier and multifractal... |
| SourceID | crossref nii elsevier |
| SourceType | Enrichment Source Index Database Publisher |
| StartPage | 72 |
| SubjectTerms | Effective media approximation Morphology Multifractal analysis Nanostructure Power spectral density Raman scattering Silicon SSCT layer |
| Title | Investigation of morphological and optical properties of nanostructured layers formed by the SSCT etching of silicon |
| URI | https://dx.doi.org/10.1016/j.apsusc.2018.08.099 https://cir.nii.ac.jp/crid/1873116917952372352 |
| Volume | 461 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV07a8MwEBZpurRD6ZOmj6ChqxtkyQ-NITSkLc2SBLIZWZLBJZVDkg5d-tt750dIoRDoYpCRbHF3vod89x0hDyKLM8E083wlU09oqTzFfOMZG_rg3fJYlC1Z3sbhaCZe5sG8RQZNLQymVda6v9Lppbau7_RqavaWed6bII4Iom-VQskDLOITIkIpf_zepnmA-q3-MsNkrA7ym_K5MsdLQSS6RiBDFpdAniUC7J_m6cDl-Y7hGZ6Sk9pjpP1qU2ekZd05Od7BEbwgmx20jMLRIqMfBdCv0WtUOUOLZXlqTZd4-r5CGFWc55QrKgjZz5U1dKHQA6foyMIo_aLgHtLJZDClyF14F65Z5wsQH3dJZsOn6WDk1e0UPA1B1AbRzTObihDCZ_hyfSuCTAFvlFQ8k1xxqyMw_1YxLXUsRMpZYEwgQqEZkwpUwRVpu8LZa0ItwptL34bgsAnw4WIOD04hsssMl8akHcIbKia6xhrHlheLpEkqe08q2idI-wQ7YUrZId521bLC2tgzP2oYlPySmQTMwZ6V98BP2BpeGUgIQ8ygSEJUHoEo-Tf_fvItOcIRJryw4I60gYP2HtyWTdot5bJLDvvPr6PxD_gJ7Cs |
| linkProvider | Elsevier |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV07T8MwELbaMgAD4ikKFDywhsqx8_CIKqoCbZe2UrfIiR0pqDhVWwYWfjt3eVRFQkJiiZTEdqy78z2c83eE3Is0TAVLmOMqGTsikcpRzNWONr4L3i0PRVGSZTT2BzPxMvfmDdKrz8JgWmWl-0udXmjr6km3omZ3mWXdCeKIIPpWIZTck02yJ2D5YhmDh69tngfo3_I3M7TG40FufX6uSPJSEIquEcmQhQWSZwEB-6t9atos27E8_WNyVLmM9LGc1QlpGHtKDneABM_IZgcuI7c0T-l7DgSsFRtVVtN8WWxb0yVuv68QRxXbWWXzEkP2Y2U0XSh0wSl6snAXf1LwD-lk0ptSZC98C_usswXIjz0ns_7TtDdwqnoKTgJR1AbhzVMTCx_iZ1i6rhFeqoA5SiqeSq64SQKw_0axRCahEDFnntae8EXCmFSgCy5Iy-bWXBJqEN9cusYHj02AExdyGDiG0C7VXGodtwmvqRglFdg41rxYRHVW2VtU0j5C2kdYClPKNnG2vZYl2MYf7YOaQdEPoYnAHvzRswP8hKnhlYGEMAQNCiSE5QHIknv175HvyP5gOhpGw-fx6zU5wDeY_cK8G9ICbpoO-DCb-LaQ0W9na-25 |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Investigation+of+morphological+and+optical+properties+of+nanostructured+layers+formed+by+the+SSCT+etching+of+silicon&rft.jtitle=Applied+Surface+Science&rft.au=Stanislav+Jure%C4%8Dka&rft.au=Kentaro+Imamura&rft.au=Taketoshi+Matsumoto&rft.au=Hikaru+Kobayashi&rft.date=2018-12-15&rft.pub=Elsevier+BV&rft.issn=0169-4332&rft.volume=461&rft.spage=72&rft.epage=77&rft_id=info:doi/10.1016%2Fj.apsusc.2018.08.099 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0169-4332&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0169-4332&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0169-4332&client=summon |