Machine-aligned fabrication of submicron SIS tunnel junctions using a focused ion beam
The objective of our research is to develop a machine-aligned technique for the definition and insulation of Nb/Al-AlO/sub x//Nb superconducting-insulating-superconducting (SIS) tunnel junctions with areas as small as 0.2 /spl mu/m/sup 2/. The fabrication of such ultrasmall area planar SIS junctions...
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Published in | IEEE transactions on applied superconductivity Vol. 9; no. 2; pp. 3240 - 3243 |
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Main Authors | , , |
Format | Journal Article Conference Proceeding |
Language | English |
Published |
New York, NY
IEEE
01.06.1999
Institute of Electrical and Electronics Engineers |
Subjects | |
Online Access | Get full text |
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