Effect of Mg addition on the physical properties of aluminum nitride - Anggraini, Sri Ayu; Uehara, Masato; Yamada, Hiroshi; Akiyama, Morito (Materials letters, 2018)
Keywords: AlN; Aluminum nitride; Dielectric loss; Dielectrics; Magnesium; Materials science; Mechanical properties; Modulus of elasticity; Permittivity; Physical properties; Piezoelectric material; Piezoelectricity; Relativity; Sputtering; Thin film; Thin films; Piezoelectric material; AlN; Mg; Sputtering; Thin film