Mechanisms of GaAs atomic layer epitaxy: a review of progress - Heitzinger, John M; White, J.M; Ekerdt, J.G (Surface science, 1994)
Keywords: Adsorption and desorption kinetics; evaporation and condensation; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Exact sciences and technology; Materials science; Methods of deposition of films and coatings; film growth and epitaxy; Physics; Solid-fluid interfaces; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Vapor phase epitaxy; growth from vapor phase; Crystal growth; Gallium arsenides; Atomic layer method; Reviews; Semiconductor materials; Adsorption; Epitaxy; Desorption