Impact of ex-situ and in-situ cleans on the performance of bipolar transistors with low thermal budget in-situ phosphorus-doped polysilicon emitter contacts - Rahim, A.I.A.; Marsh, C.D.; Ashburn, P.; Booker, G.R. (IEEE transactions on electron devices, 2001)
Keywords: Clusters; Density; Deposition; Emittance; Emitters (electron); Etching; Furnaces; Silicon