APA (7th ed.) Citation

Rahim, A., Marsh, C., Ashburn, P., & Booker, G. (2001). Impact of ex-situ and in-situ cleans on the performance of bipolar transistors with low thermal budget in-situ phosphorus-doped polysilicon emitter contacts. IEEE transactions on electron devices, 48(11), 2506-2513. https://doi.org/10.1109/16.960375

Chicago Style (17th ed.) Citation

Rahim, A.I.A, C.D Marsh, P. Ashburn, and G.R Booker. "Impact of Ex-situ and In-situ Cleans on the Performance of Bipolar Transistors with Low Thermal Budget In-situ Phosphorus-doped Polysilicon Emitter Contacts." IEEE Transactions on Electron Devices 48, no. 11 (2001): 2506-2513. https://doi.org/10.1109/16.960375.

MLA (9th ed.) Citation

Rahim, A.I.A, et al. "Impact of Ex-situ and In-situ Cleans on the Performance of Bipolar Transistors with Low Thermal Budget In-situ Phosphorus-doped Polysilicon Emitter Contacts." IEEE Transactions on Electron Devices, vol. 48, no. 11, 2001, pp. 2506-2513, https://doi.org/10.1109/16.960375.