Fractional robust adaptive decoupled control for attenuating creep, hysteresis and cross coupling in a parallel piezostage
Parallel micropositioning piezostages are widely used in the micro-/nano-manipulation applications, but also subject to the nonlinear disturbances, like hysteresis, creep and cross-coupling effects. In this paper, a new fractional robust adaptive decoupled control (FRADC) is synthesized for a six-ax...
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| Published in | Mechanical systems and signal processing Vol. 159; p. 107764 |
|---|---|
| Main Authors | , , , , , |
| Format | Journal Article |
| Language | English |
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Berlin
Elsevier Ltd
01.10.2021
Elsevier BV |
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| Abstract | Parallel micropositioning piezostages are widely used in the micro-/nano-manipulation applications, but also subject to the nonlinear disturbances, like hysteresis, creep and cross-coupling effects. In this paper, a new fractional robust adaptive decoupled control (FRADC) is synthesized for a six-axis parallel micropositioning piezostage to improve the positioning accuracy. The proposed FRADC contains three intuitional terms: (1) a decoupling term that alleviates the coupled motions among different axes, making the controller implementation more convenient and efficient; (2) a feedforward compensation term based on a fractional normalized Bouc-Wen (FONBW) model, compensating for the rate-dependent hysteresis effect induced by the piezoelectric actuators; (3) a feedback model reference adaptive control (MRAC) term with fractional proportional-plus-integral-type updating rules that suppresses the creep effect, parameters uncertainty and external disturbances, further enhancing the robustness and positioning accuracy. The stability of the closed-loop system is analyzed in theory. The effectiveness of the proposed FRADC is experimentally validated by comparing with the standalone inverse-FONBW-based feedforward control, the standalone feedback fractional MRAC, and the traditional integer-order control methods. Results demonstrate that the proposed FRADC can guarantee higher positioning accuracy for the piezostage system in wider control bandwidth. |
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| AbstractList | Parallel micropositioning piezostages are widely used in the micro-/nano-manipulation applications, but also subject to the nonlinear disturbances, like hysteresis, creep and cross-coupling effects. In this paper, a new fractional robust adaptive decoupled control (FRADC) is synthesized for a six-axis parallel micropositioning piezostage to improve the positioning accuracy. The proposed FRADC contains three intuitional terms: (1) a decoupling term that alleviates the coupled motions among different axes, making the controller implementation more convenient and efficient; (2) a feedforward compensation term based on a fractional normalized Bouc-Wen (FONBW) model, compensating for the rate-dependent hysteresis effect induced by the piezoelectric actuators; (3) a feedback model reference adaptive control (MRAC) term with fractional proportional-plus-integral-type updating rules that suppresses the creep effect, parameters uncertainty and external disturbances, further enhancing the robustness and positioning accuracy. The stability of the closed-loop system is analyzed in theory. The effectiveness of the proposed FRADC is experimentally validated by comparing with the standalone inverse-FONBW-based feedforward control, the standalone feedback fractional MRAC, and the traditional integer-order control methods. Results demonstrate that the proposed FRADC can guarantee higher positioning accuracy for the piezostage system in wider control bandwidth. |
| ArticleNumber | 107764 |
| Author | Yang, Xiaolong Chen, Bai Wu, Hongtao Kang, Shengzheng Li, Yao Pan, Liang |
| Author_xml | – sequence: 1 givenname: Shengzheng surname: Kang fullname: Kang, Shengzheng email: kangsz@nuaa.edu.cn organization: College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Qinhuai District, Nanjing 210016, China – sequence: 2 givenname: Hongtao surname: Wu fullname: Wu, Hongtao organization: College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Qinhuai District, Nanjing 210016, China – sequence: 3 givenname: Xiaolong surname: Yang fullname: Yang, Xiaolong email: xiaolongyang@njust.edu.cn organization: School of Mechanical Engineering, Nanjing University of Science and Technology, 200 Xiaolingwei Street, Xuanwu District, Nanjing 210094, China – sequence: 4 givenname: Yao surname: Li fullname: Li, Yao organization: Industrial Center, School of Innovation and Entrepreneurship, Nanjing Institute of Technology, 1 Hongjing Avenue, Jiangning District, Nanjing 211167, China – sequence: 5 givenname: Liang surname: Pan fullname: Pan, Liang organization: College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Qinhuai District, Nanjing 210016, China – sequence: 6 givenname: Bai surname: Chen fullname: Chen, Bai organization: College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Qinhuai District, Nanjing 210016, China |
| BookMark | eNqFkE1rGzEQhkVwIHaSX5CLoNeuo4_1rnTooZimLQR6ac5iVppNZDbSVtIG7F-ftd1TD81pYHifYd5nRRYhBiTkjrM1Z7y53633rzmPa8EEnzdt29QXZMmZbioueLMgS6aUqqRo2RVZ5bxjjOmaNUtyeEhgi48BBppiN-VCwcFY_BtShzZO44CO2hhKigPtY6JQCoYJig_P1CbE8TN92eeCCbPPFMKcTjFnemKPIR8o0BESDAMOdPR4iLnAM96Qyx6GjLd_5zV5evj2e_ujevz1_ef262NlpW5LVaPqOVMScONa3nfatb1yXcuk1VI3Uri61nXT1VoqFGhFh5p3WoDrnVXaymvy6Xx3TPHPhLmYXZzSXDgbsZGy1UzxzZyS59Tp-4S9GZN_hbQ3nJmjZLMzJ8nmKNmcJc-U_oeyvsDRZ0nghw_YL2cW5_JvHpPJ1mOw6HxCW4yL_r_8O_WWnt4 |
| CitedBy_id | crossref_primary_10_3390_machines12100722 crossref_primary_10_1109_TIE_2021_3127022 crossref_primary_10_1109_TII_2021_3081418 crossref_primary_10_1109_ACCESS_2022_3198943 crossref_primary_10_1016_j_ymssp_2022_108801 crossref_primary_10_1088_1402_4896_acba52 crossref_primary_10_1016_j_ymssp_2022_109046 crossref_primary_10_1016_j_ymssp_2022_109950 crossref_primary_10_1016_j_ymssp_2024_111715 crossref_primary_10_1016_j_engstruct_2023_116526 crossref_primary_10_1007_s40998_021_00451_8 crossref_primary_10_1177_00202940231159928 crossref_primary_10_1016_j_ymssp_2022_109925 crossref_primary_10_1016_j_ymssp_2023_110206 crossref_primary_10_1007_s11071_025_10873_2 |
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| ContentType | Journal Article |
| Copyright | 2021 Elsevier Ltd Copyright Elsevier BV Oct 2021 |
| Copyright_xml | – notice: 2021 Elsevier Ltd – notice: Copyright Elsevier BV Oct 2021 |
| DBID | AAYXX CITATION 7SC 7SP 8FD JQ2 L7M L~C L~D |
| DOI | 10.1016/j.ymssp.2021.107764 |
| DatabaseName | CrossRef Computer and Information Systems Abstracts Electronics & Communications Abstracts Technology Research Database ProQuest Computer Science Collection Advanced Technologies Database with Aerospace Computer and Information Systems Abstracts Academic Computer and Information Systems Abstracts Professional |
| DatabaseTitle | CrossRef Technology Research Database Computer and Information Systems Abstracts – Academic Electronics & Communications Abstracts ProQuest Computer Science Collection Computer and Information Systems Abstracts Advanced Technologies Database with Aerospace Computer and Information Systems Abstracts Professional |
| DatabaseTitleList | Technology Research Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1096-1216 |
| ExternalDocumentID | 10_1016_j_ymssp_2021_107764 S088832702100159X |
| GroupedDBID | --K --M .~1 0R~ 1B1 1~. 1~5 29M 4.4 457 4G. 5GY 5VS 7-5 71M 8P~ 9JN AACTN AAEDT AAEDW AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AAQXK AAXUO AAYFN ABBOA ABEFU ABFNM ABJNI ABMAC ABXDB ABYKQ ACDAQ ACGFS ACNNM ACRLP ACZNC ADBBV ADEZE ADFGL ADJOM ADMUD ADTZH AEBSH AECPX AEKER AENEX AFKWA AFTJW AGHFR AGUBO AGYEJ AHHHB AHJVU AHZHX AIALX AIEXJ AIKHN AITUG AJBFU AJOXV ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ AOUOD ASPBG AVWKF AXJTR AZFZN BJAXD BKOJK BLXMC CAG COF CS3 DM4 DU5 EBS EFBJH EFLBG EJD EO8 EO9 EP2 EP3 F5P FDB FEDTE FGOYB FIRID FNPLU FYGXN G-2 G-Q G8K GBLVA GBOLZ HLZ HVGLF HZ~ IHE J1W JJJVA KOM LG5 LG9 LY7 M41 MO0 N9A O-L O9- OAUVE OZT P-8 P-9 P2P PC. Q38 R2- RIG ROL RPZ SBC SDF SDG SDP SES SET SEW SPC SPCBC SPD SST SSV SSZ T5K WUQ XPP ZMT ZU3 ~G- AATTM AAXKI AAYWO AAYXX ABDPE ABWVN ACRPL ACVFH ADCNI ADNMO AEIPS AEUPX AFJKZ AFPUW AFXIZ AGCQF AGQPQ AGRNS AIGII AIIUN AKBMS AKRWK AKYEP ANKPU APXCP BNPGV CITATION SSH 7SC 7SP 8FD EFKBS JQ2 L7M L~C L~D |
| ID | FETCH-LOGICAL-c397t-4e8f1083ae5d71fb9d7f8db703c939632d44946b4938e2ec2be91b92adfdc89c3 |
| IEDL.DBID | .~1 |
| ISSN | 0888-3270 |
| IngestDate | Wed Aug 13 10:52:21 EDT 2025 Thu Apr 24 23:10:22 EDT 2025 Tue Jul 01 04:30:10 EDT 2025 Fri Feb 23 02:45:28 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Keywords | Piezoelectric device Cross coupling Fractional order Creep Adaptive control Hysteresis |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c397t-4e8f1083ae5d71fb9d7f8db703c939632d44946b4938e2ec2be91b92adfdc89c3 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 14 |
| PQID | 2533790815 |
| PQPubID | 2045429 |
| ParticipantIDs | proquest_journals_2533790815 crossref_primary_10_1016_j_ymssp_2021_107764 crossref_citationtrail_10_1016_j_ymssp_2021_107764 elsevier_sciencedirect_doi_10_1016_j_ymssp_2021_107764 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | October 2021 2021-10-00 20211001 |
| PublicationDateYYYYMMDD | 2021-10-01 |
| PublicationDate_xml | – month: 10 year: 2021 text: October 2021 |
| PublicationDecade | 2020 |
| PublicationPlace | Berlin |
| PublicationPlace_xml | – name: Berlin |
| PublicationTitle | Mechanical systems and signal processing |
| PublicationYear | 2021 |
| Publisher | Elsevier Ltd Elsevier BV |
| Publisher_xml | – name: Elsevier Ltd – name: Elsevier BV |
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| SSID | ssj0009406 |
| Score | 2.4414382 |
| Snippet | Parallel micropositioning piezostages are widely used in the micro-/nano-manipulation applications, but also subject to the nonlinear disturbances, like... |
| SourceID | proquest crossref elsevier |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| StartPage | 107764 |
| SubjectTerms | Accuracy Adaptive control Control methods Creep Cross coupling Decoupling Disturbances Feedback control Feedforward control Fractional order Hysteresis Micropositioning Model reference adaptive control Parameter uncertainty Piezoelectric actuators Piezoelectric device Robust control Stability analysis |
| Title | Fractional robust adaptive decoupled control for attenuating creep, hysteresis and cross coupling in a parallel piezostage |
| URI | https://dx.doi.org/10.1016/j.ymssp.2021.107764 https://www.proquest.com/docview/2533790815 |
| Volume | 159 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV25TsQwELUQNFAgTnHLBSVhWceJ4xIhVgsIGkDazvIVCArZaLNbQMG3M5ODS4KCMs5MFHmuZ2nmmZDDyLtQMCsCEck04IKngbFpHDAdam5jo7XBQeHrm3h4zy9H0WiOnHWzMNhW2eb-JqfX2bpd6bW72SuzrHcL8QHuKPDQAjVNjnCCnQv08uO3zzYPyev7NVE4QOmOeaju8Xp5riokrWR9WBEi5r9Vpx95ui4-gxWy3KJGetr82CqZ88UaWfrCJbhOXgeTZkYB5CZjM6umVDtdYjajDs6YszL3jrad6RSgKkVmzQKZvosHCtjRl0f0EXmd4QCeVVQXII0_SWtdFMoKqilyhee5z2mZ-dcxYMsHv0HuB-d3Z8OgvVghsAA_pgH3SdoH7KV95EQ_NdKJNHEGgt_KECKSOc4ljw2XYeKZt8x42TeSaZc6m0gbbpL5Ylz4LUKNCYU0Hl5IQFbaS80T5xLQlzbW0ck2Yd2GKtuyjuPlF7nq2sueVG0FhVZQjRW2ydGHUtmQbvwtHneWUt98R0FZ-Ftxr7OrakO3UgwAsJCAlKKd_353lyziU9Pzt0fmp5OZ3wfsMjUHtXMekIXTi6vhzTu47_Kv |
| linkProvider | Elsevier |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1Lb9QwEB6V7QE4IJ6itIAPHBst6zhxfKwqVlva7oVW2pvlV0pQyEab3QP99Z1JHF4SPXC1ZyzL45n5LM18BviQBZ9K7mQiM1UmQooysa7ME25SI1xujbHUKHy5zBfX4vMqW-3B6dgLQ2WVMfYPMb2P1nFkGk9z2lbV9Av6B15HSY8WzGlq9QD2iZ0qm8D-ydn5YvmLe1f0X2ySfEIKI_lQX-b143vXEW8ln-GIlLn4V4L6K1T3-Wf-FJ5E4MhOhr09g73QPIfHv9EJvoDb-WZoU0C5zdruui0z3rQU0JjHZ-aurYNnsTidIVplRK7ZENl3c8MQPob2mH0lamd8g1cdMw1K0yZZr0tCVcMMI7rwug41a6twu0Z4eRNewvX809XpIol_KyQOEcg2EaEoZwi_TMi8nJVWeVkW3qL_O5WiU3IvhBK5FSotAg-O26BmVnHjS-8K5dJXMGnWTXgNzNpUKhtwQiG4MkEZUXhfoL5yuck-HgAfD1S7SDxO_1_Ueqww-6Z7K2iygh6scADHP5XagXfjfvF8tJT-4_pozAz3Kx6NdtXRezvNEQNLhWApe_O_676Hh4urywt9cbY8P4RHNDOUAB7BZLvZhbcIZbb2XbyqdwOG9WA |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Fractional+robust+adaptive+decoupled+control+for+attenuating+creep%2C+hysteresis+and+cross+coupling+in+a+parallel+piezostage&rft.jtitle=Mechanical+systems+and+signal+processing&rft.au=Kang%2C+Shengzheng&rft.au=Wu%2C+Hongtao&rft.au=Yang%2C+Xiaolong&rft.au=Li%2C+Yao&rft.date=2021-10-01&rft.pub=Elsevier+Ltd&rft.issn=0888-3270&rft.eissn=1096-1216&rft.volume=159&rft_id=info:doi/10.1016%2Fj.ymssp.2021.107764&rft.externalDocID=S088832702100159X |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0888-3270&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0888-3270&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0888-3270&client=summon |