Effects of hydrogen incorporation and heat treatment on the properties of ZnO:Al films deposited on polymer substrate for flexible solar cell applications

• Published in: Current applied physics Vol. 10; no. 3; pp. S515 - S519
• Main Author: Lee, Jae-Hyeong
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.05.2010; 한국물리학회
• Subjects: Aluminum doped zinc oxide (AZO); Hydrogen incorporation; Solar cell; Transparent conductive oxide (TCO); 물리학; Solar cell; Transparent conductive oxide (TCO); Aluminum doped zinc oxide (AZO); Hydrogen incorporation

Aluminum doped zinc oxide (AZO) films incorporated with hydrogen were prepared by r.f. magnetron sputtering. The hydrogen content in the films was controlled by changing hydrogen gas ratio to argon gas. The influence of the hydrogen doping on the structural, electrical and optical properties of AZO...