Electrostatic pull-in instability in MEMS/NEMS: A review

• Published in: Sensors and actuators. A. Physical. Vol. 214; pp. 187 - 218
• Main Authors: Zhang, Wen-Ming, Yan, Han, Peng, Zhi-Ke, Meng, Guang
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01.08.2014
• Subjects: Actuators; Devices; Electrostatics; Instability; Mathematical analysis; Microelectromechanical systems; Nanoelectromechanical systems; Stability

Pull-in instability as an inherently nonlinear and crucial effect continues to become increasingly important for the design of electrostatic MEMS and NEMS devices and ever more interesting scientifically. This review reports not only the overview of the pull-in phenomenon in electrostatically actuat...