Electrostatic pull-in instability in MEMS/NEMS: A review
Pull-in instability as an inherently nonlinear and crucial effect continues to become increasingly important for the design of electrostatic MEMS and NEMS devices and ever more interesting scientifically. This review reports not only the overview of the pull-in phenomenon in electrostatically actuat...
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| Published in | Sensors and actuators. A. Physical. Vol. 214; pp. 187 - 218 |
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| Main Authors | , , , |
| Format | Journal Article |
| Language | English |
| Published |
Elsevier B.V
01.08.2014
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| Subjects | |
| Online Access | Get full text |
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| Abstract | Pull-in instability as an inherently nonlinear and crucial effect continues to become increasingly important for the design of electrostatic MEMS and NEMS devices and ever more interesting scientifically. This review reports not only the overview of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices, but also the physical principles that have enabled fundamental insights into the pull-in instability as well as pull-in induced failures. Pull-in governing equations and conditions to characterize and predict the static, dynamic and resonant pull-in behaviors are summarized. Specifically, we have described and discussed on various state-of-the-art approaches for extending the travel range, controlling the pull-in instability and further enhancing the performance of MEMS and NEMS devices with electrostatic actuation and sensing. A number of recent activities and achievements methods for control of torsional electrostatic micromirrors are introduced. The on-going development in pull-in applications that are being used to develop a fundamental understanding of pull-in instability from negative to positive influences is included and highlighted. Future research trends and challenges are further outlined. |
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| AbstractList | Pull-in instability as an inherently nonlinear and crucial effect continues to become increasingly important for the design of electrostatic MEMS and NEMS devices and ever more interesting scientifically. This review reports not only the overview of the pull-in phenomenon in electrostatically actuated MEMS and NEMS devices, but also the physical principles that have enabled fundamental insights into the pull-in instability as well as pull-in induced failures. Pull-in governing equations and conditions to characterize and predict the static, dynamic and resonant pull-in behaviors are summarized. Specifically, we have described and discussed on various state-of-the-art approaches for extending the travel range, controlling the pull-in instability and further enhancing the performance of MEMS and NEMS devices with electrostatic actuation and sensing. A number of recent activities and achievements methods for control of torsional electrostatic micromirrors are introduced. The on-going development in pull-in applications that are being used to develop a fundamental understanding of pull-in instability from negative to positive influences is included and highlighted. Future research trends and challenges are further outlined. |
| Author | Peng, Zhi-Ke Zhang, Wen-Ming Yan, Han Meng, Guang |
| Author_xml | – sequence: 1 givenname: Wen-Ming surname: Zhang fullname: Zhang, Wen-Ming email: wenmingz@sjtu.edu.cn – sequence: 2 givenname: Han surname: Yan fullname: Yan, Han – sequence: 3 givenname: Zhi-Ke surname: Peng fullname: Peng, Zhi-Ke – sequence: 4 givenname: Guang surname: Meng fullname: Meng, Guang |
| BookMark | eNp9kE1LAzEQhoNUsK3-AG979LLbfGejp1LqB7R6UM8hTWchJd2tyVbpvzelnjwUhpkhvE9gnhEatF0LCN0SXBFM5GRTpdZWFBNe4VxUXKAhqRUrGZZ6gIZYU15yytUVGqW0wRgzptQQ1fMAro9d6m3vXbHbh1D6tvBtflj54PtD3ovlfPk-ec3tvpgWEb49_Fyjy8aGBDd_c4w-H-cfs-dy8fb0MpsuSse07EurFV01klgtQBGmHROW1lw2sOZ5tW4lBIcaOFVQ46bRjeQMckAJqyVTbIzuTv_uYve1h9SbrU8OQrAtdPtkiFREEIY1y1Fyirp8T4rQmF30WxsPhmBztGQ2JlsyR0sG56IiM-of4_xRRdf20fpwlnw4kZCvz0aiSc5D62DtY1Zq1p0_Q_8CyVWB1g |
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10.1109/TDMR.2012.2191291 |
| ContentType | Journal Article |
| Copyright | 2014 Elsevier B.V. |
| Copyright_xml | – notice: 2014 Elsevier B.V. |
| DBID | AAYXX CITATION 7SP 7TB 7U5 8FD FR3 L7M |
| DOI | 10.1016/j.sna.2014.04.025 |
| DatabaseName | CrossRef Electronics & Communications Abstracts Mechanical & Transportation Engineering Abstracts Solid State and Superconductivity Abstracts Technology Research Database Engineering Research Database Advanced Technologies Database with Aerospace |
| DatabaseTitle | CrossRef Solid State and Superconductivity Abstracts Engineering Research Database Technology Research Database Mechanical & Transportation Engineering Abstracts Advanced Technologies Database with Aerospace Electronics & Communications Abstracts |
| DatabaseTitleList | Solid State and Superconductivity Abstracts |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1873-3069 |
| EndPage | 218 |
| ExternalDocumentID | 10_1016_j_sna_2014_04_025 S0924424714002088 |
| GroupedDBID | --K --M -~X .~1 0R~ 123 1B1 1RT 1~. 1~5 4.4 457 4G. 5VS 7-5 71M 8P~ 9JN AABNK AACTN AAEDT AAEDW AAIAV AAIKJ AAKOC AALRI AAOAW AAQFI AARLI AAXUO ABMAC ABNEU ABXDB ABYKQ ACDAQ ACFVG ACGFS ACIWK ACRLP ADBBV ADECG ADEZE ADTZH AEBSH AECPX AEKER AFKWA AFTJW AFZHZ AGHFR AGUBO AGYEJ AHHHB AHJVU AIEXJ AIKHN AITUG AIVDX AJBFU AJOXV AJSZI ALMA_UNASSIGNED_HOLDINGS AMFUW AMRAJ AXJTR BJAXD BKOJK BLXMC CS3 EBS EFJIC EFLBG EO8 EO9 EP2 EP3 F5P FDB FIRID FLBIZ FNPLU FYGXN G-Q GBLVA IHE J1W JJJVA KOM LY7 M36 M41 MO0 N9A O-L O9- OAUVE OGIMB OZT P-8 P-9 P2P PC. Q38 RNS ROL RPZ SDF SDG SDP SES SPC SPCBC SPD SSK SSQ SST SSZ T5K TN5 YK3 ~G- AAQXK AATTM AAXKI AAYWO AAYXX ABFNM ABWVN ACNNM ACRPL ADMUD ADNMO AEIPS AFJKZ AFXIZ AGCQF AGQPQ AGRNS AIIUN AJQLL ANKPU APXCP ASPBG AVWKF AZFZN BNPGV CITATION EJD FEDTE FGOYB G-2 HMU HVGLF HZ~ R2- SCB SCH SET SEW SSH WUQ 7SP 7TB 7U5 8FD FR3 L7M |
| ID | FETCH-LOGICAL-c396t-a972bf61a95e7139c35a2846fed435aacb554e8e427e80ff9f643e84675a96373 |
| IEDL.DBID | .~1 |
| ISSN | 0924-4247 |
| IngestDate | Thu Jul 10 23:09:53 EDT 2025 Tue Jul 01 04:44:47 EDT 2025 Thu Apr 24 23:10:09 EDT 2025 Fri Feb 23 02:16:34 EST 2024 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c396t-a972bf61a95e7139c35a2846fed435aacb554e8e427e80ff9f643e84675a96373 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
| PQID | 1671513093 |
| PQPubID | 23500 |
| PageCount | 32 |
| ParticipantIDs | proquest_miscellaneous_1671513093 crossref_primary_10_1016_j_sna_2014_04_025 crossref_citationtrail_10_1016_j_sna_2014_04_025 elsevier_sciencedirect_doi_10_1016_j_sna_2014_04_025 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2014-08-01 2014-08-00 20140801 |
| PublicationDateYYYYMMDD | 2014-08-01 |
| PublicationDate_xml | – month: 08 year: 2014 text: 2014-08-01 day: 01 |
| PublicationDecade | 2010 |
| PublicationTitle | Sensors and actuators. A. Physical. |
| PublicationYear | 2014 |
| Publisher | Elsevier B.V |
| Publisher_xml | – name: Elsevier B.V |
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| SSID | ssj0003377 |
| Score | 2.6068676 |
| SecondaryResourceType | review_article |
| Snippet | Pull-in instability as an inherently nonlinear and crucial effect continues to become increasingly important for the design of electrostatic MEMS and NEMS... |
| SourceID | proquest crossref elsevier |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| StartPage | 187 |
| SubjectTerms | Actuators Devices Electrostatics Instability Mathematical analysis Microelectromechanical systems Nanoelectromechanical systems Stability |
| Title | Electrostatic pull-in instability in MEMS/NEMS: A review |
| URI | https://dx.doi.org/10.1016/j.sna.2014.04.025 https://www.proquest.com/docview/1671513093 |
| Volume | 214 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8NAEF5KvehBfGJ9EcGTsOaxm03WWyktVWkvtdDbskl2ISJpse3Bi7_dmTx8IT0IISRhdgmzuzPfMC9Crpn0DQu5pb40knKRGaqjxNCQGWuSLLaMY77zaCyGU_4wC2ct0mtyYTCsspb9lUwvpXX9xa256S7y3J14YDrwgGPFOew0iQm_nEe4y2_fv8I8GCu7LyIxRerGs1nGeC0LLD3k87LaKXbL_ls3_ZLSpeoZ7JHdGjM63eq39knLFAdk51slwUMS96t2NpgflKfOAgxLmhdOjuCvDH99g2dn1B9N3DHc7pyuUyWtHJHpoP_UG9K6KQJNmRQrqmUUJFb4WoYGDEyZslCDihHWZIB8tE4TAAgmNjyITOxZKy1gDoMoI9Rw2CJ2TNrFvDAnxBGlU08LJsKUA63OPCs8y6MkYmkWsw7xGnaotK4Yjo0rXlQTGvasgIMKOag8uIKwQ24-hyyqchmbiHnDY_VjzRWI803Drpr1UHAW0MGhCzNfL5UvIgAw6Ns9_d_UZ2Qb36oAv3PSXr2uzQWAjlVyWe6qS7LVvX8cjj8AeFHTwA |
| linkProvider | Elsevier |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV1LS8NAEB5qe1AP4hPfRvAkLE26jyTeirS0anuxBW_LJtmFiMSi9eC_dyYPUREPQgghmQ1hNjv7DTPzDcAFjwPLpXAsiG3MhMosM2FimeTW2SSLHBdU7zyZqtFc3DzIhxZcN7UwlFZZ2_7KppfWur7TrbXZXeR5995H10H0BDHOUafJaAU6xE4l29Dpj29H00-DzHnZgJHkGQ1ogptlmtdrQexDgSgJT6lh9u_b0w9DXe4-w03YqGGj16--bAtattiG9S9kgjsQDaqONlQilKfeAn1LlhdeTvivzIB9x2tvMpjcd6d4uvL6XlW3sgvz4WB2PWJ1XwSW8lgtmYnDXuJUYGJp0ceMUy4N7jLK2QzBjzFpghjBRlb0Qhv5zsUOYYcloCENrreQ70G7eC7sPniqjOsZxZVMBcqazHfKdyJMQp5mET8Av1GHTmvScOpd8aSb7LBHjRrUpEHt49GTB3D5OWRRMWb8JSwaHetv067Rov817LyZD43LgWIcprDPb686UCFiGArvHv7v1WewOppN7vTdeHp7BGv0pMr3O4b28uXNniAGWSan9T_2AdFP1nE |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Electrostatic+pull-in+instability+in+MEMS%2FNEMS%3A+A+review&rft.jtitle=Sensors+and+actuators.+A.+Physical.&rft.au=Zhang%2C+Wen-Ming&rft.au=Van%2C+Han&rft.au=Peng%2C+Zhi-Ke&rft.au=Meng%2C+Guang&rft.date=2014-08-01&rft.issn=0924-4247&rft.volume=A214&rft.spage=187&rft.epage=218&rft_id=info:doi/10.1016%2Fj.sna.2014.04.025&rft.externalDBID=NO_FULL_TEXT |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0924-4247&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0924-4247&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0924-4247&client=summon |