Fabrication and fluidic characterization of static micromixers made of low temperature cofired ceramic (LTCC)
Microreaction devices used for chemical synthesis must possess a high resistance against corrosive chemicals. Therefore, microreaction devices were made of glass, steel or ceramics. Photolithographic steps combined with etching processes as well as micropowder blasting or micromilling processes were...
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Published in | Chemical engineering science Vol. 63; no. 10; pp. 2773 - 2784 |
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Main Authors | , , , , |
Format | Journal Article |
Language | English |
Published |
Oxford
Elsevier Ltd
01.05.2008
Elsevier |
Subjects | |
Online Access | Get full text |
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