Fabrication and fluidic characterization of static micromixers made of low temperature cofired ceramic (LTCC)

• Published in: Chemical engineering science Vol. 63; no. 10; pp. 2773 - 2784
• Main Authors: Groß, G.A., Thelemann, T., Schneider, S., Boskovic, D., Köhler, J.M.
• Format: Journal Article
• Language: English
• Published: Oxford Elsevier Ltd 01.05.2008; Elsevier
• Subjects: Applied sciences; Chemical engineering; Exact sciences and technology; Friction factor; Hydrodynamics of contact apparatus; Lab on chip; Lab on substrate; Microfluidic; Micromixing; Microreactor; Pressure drop; Pulse trace; Reactors; Residence time distribution; RTD; Lab on chip; Lab on substrate; Micromixing; RTD; Pressure drop; Microfluidic; Pulse trace; Friction factor; Residence time distribution; Microreactor; Viscosity; Mixing; Mixer; Glass; Modeling; Low Reynolds number; Friction coefficient; Chemical synthesis; Ceramic materials; Low temperature; Fluid mechanics; Tape; Prediction; Hydrodynamics; Steel; Dispersion; Packaging; Laser ablation technique; Glass ceramics; Microfluidics

Microreaction devices used for chemical synthesis must possess a high resistance against corrosive chemicals. Therefore, microreaction devices were made of glass, steel or ceramics. Photolithographic steps combined with etching processes as well as micropowder blasting or micromilling processes were...