Nanocrystalline diamond coatings: Effects of time modulation bias enhanced HFCVD parameters

Nanocrystalline diamond NCD coatings could improve the performances of cutting tools if the adhesion on cobalt-cemented tungsten carbide WC–Co substrates was optimized and maintained during diamond deposit. In this study, a time modulated polarized growth process during diamond hot filament chemical...

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Published inAIMS materials science Vol. 5; no. 3; pp. 519 - 532
Main Authors Hodroj, Abbas, Teulé-Gay, Lionel, Lahaye, Michel, Manaud, Jean-Pierre, Poulon-Quintin, Angeline
Format Journal Article
LanguageEnglish
Published AIMS Press 01.01.2018
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Abstract Nanocrystalline diamond NCD coatings could improve the performances of cutting tools if the adhesion on cobalt-cemented tungsten carbide WC–Co substrates was optimized and maintained during diamond deposit. In this study, a time modulated polarized growth process during diamond hot filament chemical vapor deposition (HFCVD) method was used. NCD coatings were deposited on cobalt-cemented tungsten carbide (WC–10% Co) substrates previously coated with tantalum or zirconium nitride–molybdenum bilayer as interlayer systems to control carbon and cobalt diffusion. Continuous films consisted of diamond clusters. Their size decreased when the applied bias voltage increased and substrate temperature decreased. Raman analyses confirmed the reduction of crystallite size and formation of nanocrystalline diamond films by time modulated biased substrate HFCVD process. Scratch tests showed that the NCD/interlayer systems/WC–10% Co displayed very good film adhesion interesting for cutting tools applications compared to NCD/WC–10% Co. In addition using an interlayer system could offer additional protection when diamond coating was deteriorated. This technique seems to be promising for industrial applications in the field of machining tools when increasing the thickness of the diamond layer by only extending the time modulated deposition process.
AbstractList Nanocrystalline diamond NCD coatings could improve the performances of cutting tools if the adhesion on cobalt-cemented tungsten carbide WC–Co substrates was optimized and maintained during diamond deposit. In this study, a time modulated polarized growth process during diamond hot filament chemical vapor deposition (HFCVD) method was used. NCD coatings were deposited on cobalt-cemented tungsten carbide (WC–10% Co) substrates previously coated with tantalum or zirconium nitride–molybdenum bilayer as interlayer systems to control carbon and cobalt diffusion. Continuous films consisted of diamond clusters. Their size decreased when the applied bias voltage increased and substrate temperature decreased. Raman analyses confirmed the reduction of crystallite size and formation of nanocrystalline diamond films by time modulated biased substrate HFCVD process. Scratch tests showed that the NCD/interlayer systems/WC–10% Co displayed very good film adhesion interesting for cutting tools applications compared to NCD/WC–10% Co. In addition using an interlayer system could offer additional protection when diamond coating was deteriorated. This technique seems to be promising for industrial applications in the field of machining tools when increasing the thickness of the diamond layer by only extending the time modulated deposition process.
Author Manaud, Jean-Pierre
Lahaye, Michel
Teulé-Gay, Lionel
Hodroj, Abbas
Poulon-Quintin, Angeline
Author_xml – sequence: 1
  givenname: Abbas
  surname: Hodroj
  fullname: Hodroj, Abbas
– sequence: 2
  givenname: Lionel
  surname: Teulé-Gay
  fullname: Teulé-Gay, Lionel
– sequence: 3
  givenname: Michel
  surname: Lahaye
  fullname: Lahaye, Michel
– sequence: 4
  givenname: Jean-Pierre
  surname: Manaud
  fullname: Manaud, Jean-Pierre
– sequence: 5
  givenname: Angeline
  surname: Poulon-Quintin
  fullname: Poulon-Quintin, Angeline
BackLink https://hal.science/hal-01916713$$DView record in HAL
BookMark eNpVkTlPJDEQhR2AxDW_YBOnG8ysr3bbZGg4Bmm0JEBCYFX7mDHqtpHdrMS_325mF4mopFdV75XqO0NHKSeP0A9KVlxz8WuA0Zdq44oRqlZ81VB9hE4Zb9mSCCVO0KLWV0IIZU2rG3KKXn5DyrZ81BH6PiaPXYQhJ4dthjGmXb3ENyF4O1acAx7j4PGQ3Xs_NXPCXYSKfdpDst7hze36-Rq_QYHBz2dcoOMAffWLf_UcPd3ePK43y-3D3f36aru0XItxyTsRCO2UchSctNw6IRQjmiknuSDKN0JJHTS3EhxhjWDMtpJL7SFQSig_R_cHX5fh1byVOED5MBmi-RRy2RkoY7S9N9I6RpULrpNedKzpROt1mIJs20xfaSavnwevPfTfrDZXWzNrhGoqW8r_zLn8MGtLrrX48LVAiZlxmP84zIzDcDPh4H8BBLSC4w
CitedBy_id crossref_primary_10_1016_j_ijrmhm_2019_105057
crossref_primary_10_3390_mi14030664
crossref_primary_10_1016_j_surfin_2023_103839
crossref_primary_10_1016_j_surfin_2023_102717
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ContentType Journal Article
Copyright Distributed under a Creative Commons Attribution 4.0 International License
Copyright_xml – notice: Distributed under a Creative Commons Attribution 4.0 International License
CorporateAuthor 1 CNRS, Université de Bordeaux, ICMCB, UMR 5026, F-33600 Pessac, France
2 Université de Bordeaux, Placamat, UMS 3626, F-33600 Pessac, France
CorporateAuthor_xml – name: <sup>2</sup> Université de Bordeaux, Placamat, UMS 3626, F-33600 Pessac, France
– name: <sup>1</sup> CNRS, Université de Bordeaux, ICMCB, UMR 5026, F-33600 Pessac, France
DBID AAYXX
CITATION
1XC
DOA
DOI 10.3934/matersci.2018.3.519
DatabaseName CrossRef
Hyper Article en Ligne (HAL)
Directory of Open Access Journals
DatabaseTitle CrossRef
DatabaseTitleList

Database_xml – sequence: 1
  dbid: DOA
  name: Directory of Open Access Journals
  url: https://www.doaj.org/
  sourceTypes: Open Website
DeliveryMethod fulltext_linktorsrc
Discipline Engineering
EndPage 532
ExternalDocumentID oai_doaj_org_article_6cd218dfdb6e4b25b47e9f8d6c750015
oai_HAL_hal_01916713v1
10_3934_matersci_2018_3_519
GroupedDBID 5VS
AAYXX
ABDBF
ADBBV
ALMA_UNASSIGNED_HOLDINGS
BCNDV
CITATION
EBS
GROUPED_DOAJ
IAO
IGS
IPNFZ
ITC
KQ8
OK1
RAN
RIG
TUS
1XC
ID FETCH-LOGICAL-c394t-3b4f01b88d1ad6c3cd44820928d63408e54869f93c6ad025422c76369eaf11013
IEDL.DBID DOA
ISSN 2372-0484
IngestDate Tue Oct 22 14:52:37 EDT 2024
Tue Oct 15 15:17:23 EDT 2024
Thu Sep 26 18:22:25 EDT 2024
IsDoiOpenAccess true
IsOpenAccess true
IsPeerReviewed true
IsScholarly true
Issue 3
Keywords Raman
adhesion
HFCVD
NCD
time modulated polarized growth
AES
Language English
License Distributed under a Creative Commons Attribution 4.0 International License: http://creativecommons.org/licenses/by/4.0
LinkModel DirectLink
MergedId FETCHMERGED-LOGICAL-c394t-3b4f01b88d1ad6c3cd44820928d63408e54869f93c6ad025422c76369eaf11013
ORCID 0000-0002-4252-0149
0000-0001-5625-3099
0000-0002-5030-3523
OpenAccessLink https://doaj.org/article/6cd218dfdb6e4b25b47e9f8d6c750015
PageCount 14
ParticipantIDs doaj_primary_oai_doaj_org_article_6cd218dfdb6e4b25b47e9f8d6c750015
hal_primary_oai_HAL_hal_01916713v1
crossref_primary_10_3934_matersci_2018_3_519
PublicationCentury 2000
PublicationDate 2018-01-01
PublicationDateYYYYMMDD 2018-01-01
PublicationDate_xml – month: 01
  year: 2018
  text: 2018-01-01
  day: 01
PublicationDecade 2010
PublicationTitle AIMS materials science
PublicationYear 2018
Publisher AIMS Press
Publisher_xml – name: AIMS Press
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SSID ssj0001257950
Score 2.1012788
Snippet Nanocrystalline diamond NCD coatings could improve the performances of cutting tools if the adhesion on cobalt-cemented tungsten carbide WC–Co substrates was...
SourceID doaj
hal
crossref
SourceType Open Website
Open Access Repository
Aggregation Database
StartPage 519
SubjectTerms adhesion
AES
Chemical Sciences
HFCVD
Material chemistry
NCD
Raman
time modulated polarized growth
Title Nanocrystalline diamond coatings: Effects of time modulation bias enhanced HFCVD parameters
URI https://hal.science/hal-01916713
https://doaj.org/article/6cd218dfdb6e4b25b47e9f8d6c750015
Volume 5
hasFullText 1
inHoldings 1
isFullTextHit
isPrint
link http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV27TsMwFLUQEwyIpygvWYiRtHbsODFbKVQVAiaKKjFY8SNqhyaoLUj8PddxisLEwhrlYZ1r-Zxr35yL0BVwaGI4c5HLSBFxSm0EpOAiSwXhxqVJ7vyJ7tOzGI35wySZtFp9-ZqwYA8cgOsJY4GFbGG1cFzHieapk0VmhQGuIzS4lxLZSqbC7kqSyro9a8zSOIJpyoPlEJOM90ALgrYyM1_ZlXVZN_E-Oy1aqt37gWym683VmmyGu2inUYm4H0a3hzZcuY-2W96BB-gN1sXKLL5A3XlbbYch0DClLDZV7kuZlzc4OBMvcVVg30IezyvbNOvCepYvsSun9fk_Hg0Hr3fYu4DPfXXM8hCNh_cvg1HUdEqIDJN8FTHNC0J1llmaAzLMWMi6YiJjwIlxkjnIS4QsJDMit_7_9zg2sLAI6fIC-J-yI7RZVqU7RliniShIlhNBIPcDZCxoLmeJts5kkM520PUaKPUeDDEUJBIeV7XGVXlcFVPwdAfdejB_bvVu1vUFiLFqYqz-inEHXUIofr1j1H9U_hooVCog0f6kJ__xpVO05cce9ljO0OZq8eHOQXWs9EU9wb4B6d7Saw
link.rule.ids 230,315,783,787,867,888,2109,27936,27937
linkProvider Directory of Open Access Journals
openUrl ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Nanocrystalline+diamond+coatings%3A+Effects+of+time+modulation+bias+enhanced+HFCVD+parameters&rft.jtitle=AIMS+materials+science&rft.au=Abbas+Hodroj&rft.au=Lionel+Teul%C3%A9-Gay&rft.au=Michel+Lahaye&rft.au=Jean-Pierre+Manaud&rft.date=2018-01-01&rft.pub=AIMS+Press&rft.issn=2372-0484&rft.volume=5&rft.issue=3&rft.spage=519&rft.epage=532&rft_id=info:doi/10.3934%2Fmatersci.2018.3.519&rft.externalDBID=DOA&rft.externalDocID=oai_doaj_org_article_6cd218dfdb6e4b25b47e9f8d6c750015
thumbnail_l http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2372-0484&client=summon
thumbnail_m http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2372-0484&client=summon
thumbnail_s http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2372-0484&client=summon