Mechanical properties of amorphous and microcrystalline silicon films
Hydrogen-free amorphous silicon (a-Si) films with thickness of 4.5–6.5 μm were prepared by magnetron sputtering of pure silicon. Mechanical properties (hardness, intrinsic stress, elastic modulus), and film structure (Raman spectra, electron diffraction) were investigated in dependence on the substr...
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Published in | Thin solid films Vol. 516; no. 16; pp. 5368 - 5375 |
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Main Authors | , , , , , |
Format | Journal Article Conference Proceeding |
Language | English |
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Elsevier B.V
30.06.2008
Elsevier Science |
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Abstract | Hydrogen-free amorphous silicon (a-Si) films with thickness of 4.5–6.5 μm were prepared by magnetron sputtering of pure silicon. Mechanical properties (hardness, intrinsic stress, elastic modulus), and film structure (Raman spectra, electron diffraction) were investigated in dependence on the substrate bias and temperature. The increasing negative substrate bias or Ar pressure results in simultaneous reducing compressive stress, the film hardness and elastic modulus. Vacuum annealing or deposition of a-Si films at temperatures up to 600 °C saving amorphous character of the films, results in reducing compressive stress and increasing the hardness and elastic modulus. The latter value was always lower than that for monocrystalline Si(111). The crystalline structure (c-Si) starts to be formed at deposition temperature of ∼
700 °C. The hardness and elastic modulus of c-Si films were very close to monocrystalline Si(111). Phase transformations observed in the samples at indentation depend not only on the load and loading rate but also on the initial phase of silicon. However, the film hardness is not too sensitive to the presence of phase transformations. |
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AbstractList | Hydrogen-free amorphous silicon (a-Si) films with thickness of 4.5–6.5 μm were prepared by magnetron sputtering of pure silicon. Mechanical properties (hardness, intrinsic stress, elastic modulus), and film structure (Raman spectra, electron diffraction) were investigated in dependence on the substrate bias and temperature. The increasing negative substrate bias or Ar pressure results in simultaneous reducing compressive stress, the film hardness and elastic modulus. Vacuum annealing or deposition of a-Si films at temperatures up to 600 °C saving amorphous character of the films, results in reducing compressive stress and increasing the hardness and elastic modulus. The latter value was always lower than that for monocrystalline Si(111). The crystalline structure (c-Si) starts to be formed at deposition temperature of ∼
700 °C. The hardness and elastic modulus of c-Si films were very close to monocrystalline Si(111). Phase transformations observed in the samples at indentation depend not only on the load and loading rate but also on the initial phase of silicon. However, the film hardness is not too sensitive to the presence of phase transformations. |
Author | Čtvrtlík, R. Stranyánek, M. Vorlíček, V. Kurdyumov, A. Boháč, P. Kulikovsky, V. |
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Cites_doi | 10.1557/jmr.2004.19.1.338 10.1063/1.114675 10.1016/0038-1098(85)90947-0 10.1103/PhysRevB.41.7529 10.1016/S0040-6090(98)01175-4 10.1103/PhysRevB.32.874 10.1103/PhysRevB.44.3702 10.1063/1.1832757 10.1016/S0022-3093(98)00371-8 10.1557/JMR.1999.0310 10.1016/0038-1098(82)91003-1 10.1080/08957959608240470 10.1016/S1468-6996(01)00150-4 10.1016/j.actamat.2005.06.030 10.1557/jmr.2004.19.1.3 10.1103/PhysRevLett.82.3460 10.1116/1.581977 10.1016/0022-3093(88)90439-5 10.1063/1.1650898 10.1016/S0925-9635(00)00525-2 10.1088/0022-3727/36/11/310 10.1063/1.1779344 10.1063/1.111121 |
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Keywords | Elastic modulus Raman spectra Compressive stress a-Si films Hardness Vacuum annealing Phase transformations Electron diffraction Mechanical properties Raman spectroscopy Layer thickness Indentation Thin films Cathode sputtering Physical vapor deposition Stress effects Silicon Sputter deposition Microstructure Crystal structure |
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References | Laaziri, Kycia, Roorda, Chicoine, Robertson, Wang, Moss (bib23) 1999; 82 Kulikovsky, Bohac, Franc, Deineka, Vorlicek, Jastrabik (bib21) 2001; 10 Williamson (bib24) 1995; 67 Zender, Schwaller, Munnik, Mikhalov, Patscheider (bib2) 2004; 95 Zarudi, Zou, McBride, Zhang (bib16) 2004; 85 Oliver, Pharr (bib8) 2004; 19 Zarudi, Zhang, Cheong, Yu (bib18) 2005; 53 Custer, Thompson, Jacobson, Poate, Roorda, Sinke, Spaeren (bib22) 1994; 64 Beeman, Tsu, Thorpe (bib11) 1985; 32 Ossadnik, Veprek, Gregora (bib10) 1999; 337 Sinke, Warabisako, Miyao, Tokuyama, Roorda, Saris (bib13) 1988; 99 Stoney (bib9) 1909; 82 Treacy, Gibson, Keblinski (bib3) 1998; 31 Khayyat, Banini, Hasko, Munawar Chaudhri (bib17) 2003; 36 Tsu, Gonzalez-Hernandez, Pollak (bib12) 1985; 54 Williams, Chen, Wong-Leung, Kerr, Swain (bib4) 1999; 14 Domnich, Gogotsi (bib15) 2002; 3 Haberl, Bradby, Swain, Williams, Munroe (bib6) 2004; 85 Anastassakis, Cantarero, Cardona (bib19) 1990; 41 Ishidate, Inoue, Tsuji, Minomura (bib20) 1982; 42 Follstaedt, Knapp, Myers (bib5) 2004; 19 Omak, Mitamura, Yaoita, Tsuju (bib14) 1996; 15 Veprek (bib1) 1999; 17 Roorda, Sinke, Poate, Jacobson, Dieker, Dennis, Eaglesham, Spaeren, Fuoss (bib7) 1991; 44 Laaziri (10.1016/j.tsf.2007.07.047_bib23) 1999; 82 Zarudi (10.1016/j.tsf.2007.07.047_bib16) 2004; 85 Ossadnik (10.1016/j.tsf.2007.07.047_bib10) 1999; 337 Zender (10.1016/j.tsf.2007.07.047_bib2) 2004; 95 Stoney (10.1016/j.tsf.2007.07.047_bib9) 1909; 82 Khayyat (10.1016/j.tsf.2007.07.047_bib17) 2003; 36 Roorda (10.1016/j.tsf.2007.07.047_bib7) 1991; 44 Domnich (10.1016/j.tsf.2007.07.047_bib15) 2002; 3 Kulikovsky (10.1016/j.tsf.2007.07.047_bib21) 2001; 10 Custer (10.1016/j.tsf.2007.07.047_bib22) 1994; 64 Treacy (10.1016/j.tsf.2007.07.047_bib3) 1998; 31 Follstaedt (10.1016/j.tsf.2007.07.047_bib5) 2004; 19 Omak (10.1016/j.tsf.2007.07.047_bib14) 1996; 15 Anastassakis (10.1016/j.tsf.2007.07.047_bib19) 1990; 41 Tsu (10.1016/j.tsf.2007.07.047_bib12) 1985; 54 Williams (10.1016/j.tsf.2007.07.047_bib4) 1999; 14 Haberl (10.1016/j.tsf.2007.07.047_bib6) 2004; 85 Ishidate (10.1016/j.tsf.2007.07.047_bib20) 1982; 42 Oliver (10.1016/j.tsf.2007.07.047_bib8) 2004; 19 Veprek (10.1016/j.tsf.2007.07.047_bib1) 1999; 17 Williamson (10.1016/j.tsf.2007.07.047_bib24) 1995; 67 Sinke (10.1016/j.tsf.2007.07.047_bib13) 1988; 99 Zarudi (10.1016/j.tsf.2007.07.047_bib18) 2005; 53 Beeman (10.1016/j.tsf.2007.07.047_bib11) 1985; 32 |
References_xml | – volume: 41 start-page: 7529 year: 1990 ident: bib19 publication-title: Phys. Rev., B contributor: fullname: Cardona – volume: 85 start-page: 5559 year: 2004 ident: bib6 publication-title: Appl. Phys. Lett. contributor: fullname: Munroe – volume: 32 start-page: 874 year: 1985 ident: bib11 publication-title: Phys. Rev., B contributor: fullname: Thorpe – volume: 67 start-page: 226 year: 1995 ident: bib24 publication-title: Appl. Phys. Lett. contributor: fullname: Williamson – volume: 3 start-page: 1 year: 2002 ident: bib15 publication-title: Rev. Adv. Mater. Sci. contributor: fullname: Gogotsi – volume: 42 start-page: 197 year: 1982 ident: bib20 publication-title: Solid State Commun. contributor: fullname: Minomura – volume: 19 start-page: 338 year: 2004 ident: bib5 publication-title: J. Mater. Res. contributor: fullname: Myers – volume: 85 start-page: 932 year: 2004 ident: bib16 publication-title: Appl. Phys. Lett. contributor: fullname: Zhang – volume: 36 start-page: 1300 year: 2003 ident: bib17 publication-title: J. Phys. D: Appl. Phys. contributor: fullname: Munawar Chaudhri – volume: 54 start-page: 447 year: 1985 ident: bib12 publication-title: Solid State Commun. contributor: fullname: Pollak – volume: 10 start-page: 1076 year: 2001 ident: bib21 publication-title: Diamond Relat. Mater. contributor: fullname: Jastrabik – volume: 19 start-page: 3 year: 2004 ident: bib8 publication-title: J. Mater. Res. contributor: fullname: Pharr – volume: 14 start-page: 2338 year: 1999 ident: bib4 publication-title: J. Mater. Res. contributor: fullname: Swain – volume: 337 start-page: 148 year: 1999 ident: bib10 publication-title: Thin Solid Films contributor: fullname: Gregora – volume: 53 start-page: 4795 year: 2005 ident: bib18 publication-title: Acta Mater. contributor: fullname: Yu – volume: 95 start-page: 4327 year: 2004 ident: bib2 publication-title: J. Appl. Phys. contributor: fullname: Patscheider – volume: 31 start-page: 99 year: 1998 ident: bib3 publication-title: J. Non-Cryst. Solids contributor: fullname: Keblinski – volume: 64 start-page: 437 year: 1994 ident: bib22 publication-title: Appl. Phys. Lett. contributor: fullname: Spaeren – volume: 82 start-page: 3460 year: 1999 ident: bib23 publication-title: Phys. Rev. Lett. contributor: fullname: Moss – volume: 44 start-page: 3702 year: 1991 ident: bib7 publication-title: Phys. Rev., B contributor: fullname: Fuoss – volume: 99 start-page: 308 year: 1988 ident: bib13 publication-title: J. Non-Cryst. Solids contributor: fullname: Saris – volume: 15 start-page: 167 year: 1996 ident: bib14 publication-title: High Press. Res. contributor: fullname: Tsuju – volume: 17 start-page: 2401 year: 1999 ident: bib1 publication-title: J. Vac. Sci. Technol., A, Vac. Surf. Films contributor: fullname: Veprek – volume: 82 start-page: 172 year: 1909 ident: bib9 publication-title: Proc. R. Soc. A contributor: fullname: Stoney – volume: 19 start-page: 338 issue: 1 year: 2004 ident: 10.1016/j.tsf.2007.07.047_bib5 publication-title: J. Mater. Res. doi: 10.1557/jmr.2004.19.1.338 contributor: fullname: Follstaedt – volume: 67 start-page: 226 year: 1995 ident: 10.1016/j.tsf.2007.07.047_bib24 publication-title: Appl. Phys. Lett. doi: 10.1063/1.114675 contributor: fullname: Williamson – volume: 54 start-page: 447 issue: 5 year: 1985 ident: 10.1016/j.tsf.2007.07.047_bib12 publication-title: Solid State Commun. doi: 10.1016/0038-1098(85)90947-0 contributor: fullname: Tsu – volume: 41 start-page: 7529 year: 1990 ident: 10.1016/j.tsf.2007.07.047_bib19 publication-title: Phys. Rev., B doi: 10.1103/PhysRevB.41.7529 contributor: fullname: Anastassakis – volume: 337 start-page: 148 year: 1999 ident: 10.1016/j.tsf.2007.07.047_bib10 publication-title: Thin Solid Films doi: 10.1016/S0040-6090(98)01175-4 contributor: fullname: Ossadnik – volume: 32 start-page: 874 issue: 2 year: 1985 ident: 10.1016/j.tsf.2007.07.047_bib11 publication-title: Phys. Rev., B doi: 10.1103/PhysRevB.32.874 contributor: fullname: Beeman – volume: 44 start-page: 3702 issue: 8 year: 1991 ident: 10.1016/j.tsf.2007.07.047_bib7 publication-title: Phys. Rev., B doi: 10.1103/PhysRevB.44.3702 contributor: fullname: Roorda – volume: 85 start-page: 5559 issue: 23 year: 2004 ident: 10.1016/j.tsf.2007.07.047_bib6 publication-title: Appl. Phys. Lett. doi: 10.1063/1.1832757 contributor: fullname: Haberl – volume: 31 start-page: 99 year: 1998 ident: 10.1016/j.tsf.2007.07.047_bib3 publication-title: J. Non-Cryst. Solids doi: 10.1016/S0022-3093(98)00371-8 contributor: fullname: Treacy – volume: 14 start-page: 2338 issue: 6 year: 1999 ident: 10.1016/j.tsf.2007.07.047_bib4 publication-title: J. Mater. Res. doi: 10.1557/JMR.1999.0310 contributor: fullname: Williams – volume: 42 start-page: 197 year: 1982 ident: 10.1016/j.tsf.2007.07.047_bib20 publication-title: Solid State Commun. doi: 10.1016/0038-1098(82)91003-1 contributor: fullname: Ishidate – volume: 15 start-page: 167 year: 1996 ident: 10.1016/j.tsf.2007.07.047_bib14 publication-title: High Press. Res. doi: 10.1080/08957959608240470 contributor: fullname: Omak – volume: 82 start-page: 172 year: 1909 ident: 10.1016/j.tsf.2007.07.047_bib9 publication-title: Proc. R. Soc. A contributor: fullname: Stoney – volume: 3 start-page: 1 year: 2002 ident: 10.1016/j.tsf.2007.07.047_bib15 publication-title: Rev. Adv. Mater. Sci. doi: 10.1016/S1468-6996(01)00150-4 contributor: fullname: Domnich – volume: 53 start-page: 4795 year: 2005 ident: 10.1016/j.tsf.2007.07.047_bib18 publication-title: Acta Mater. doi: 10.1016/j.actamat.2005.06.030 contributor: fullname: Zarudi – volume: 19 start-page: 3 issue: 1 year: 2004 ident: 10.1016/j.tsf.2007.07.047_bib8 publication-title: J. Mater. Res. doi: 10.1557/jmr.2004.19.1.3 contributor: fullname: Oliver – volume: 82 start-page: 3460 year: 1999 ident: 10.1016/j.tsf.2007.07.047_bib23 publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.82.3460 contributor: fullname: Laaziri – volume: 17 start-page: 2401 issue: 5 year: 1999 ident: 10.1016/j.tsf.2007.07.047_bib1 publication-title: J. Vac. Sci. Technol., A, Vac. Surf. Films doi: 10.1116/1.581977 contributor: fullname: Veprek – volume: 99 start-page: 308 year: 1988 ident: 10.1016/j.tsf.2007.07.047_bib13 publication-title: J. Non-Cryst. Solids doi: 10.1016/0022-3093(88)90439-5 contributor: fullname: Sinke – volume: 95 start-page: 4327 year: 2004 ident: 10.1016/j.tsf.2007.07.047_bib2 publication-title: J. Appl. Phys. doi: 10.1063/1.1650898 contributor: fullname: Zender – volume: 10 start-page: 1076 year: 2001 ident: 10.1016/j.tsf.2007.07.047_bib21 publication-title: Diamond Relat. Mater. doi: 10.1016/S0925-9635(00)00525-2 contributor: fullname: Kulikovsky – volume: 36 start-page: 1300 year: 2003 ident: 10.1016/j.tsf.2007.07.047_bib17 publication-title: J. Phys. D: Appl. Phys. doi: 10.1088/0022-3727/36/11/310 contributor: fullname: Khayyat – volume: 85 start-page: 932 year: 2004 ident: 10.1016/j.tsf.2007.07.047_bib16 publication-title: Appl. Phys. Lett. doi: 10.1063/1.1779344 contributor: fullname: Zarudi – volume: 64 start-page: 437 year: 1994 ident: 10.1016/j.tsf.2007.07.047_bib22 publication-title: Appl. Phys. Lett. doi: 10.1063/1.111121 contributor: fullname: Custer |
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Snippet | Hydrogen-free amorphous silicon (a-Si) films with thickness of 4.5–6.5 μm were prepared by magnetron sputtering of pure silicon. Mechanical properties... |
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SubjectTerms | a-Si films Compressive stress Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science; rheology Deposition by sputtering Elastic modulus Exact sciences and technology Hardness Materials science Mechanical and acoustical properties Methods of deposition of films and coatings; film growth and epitaxy Physical properties of thin films, nonelectronic Physics Raman spectra Structure and morphology; thickness Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) Thin film structure and morphology |
Title | Mechanical properties of amorphous and microcrystalline silicon films |
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