Increase in the piezoelectric response of scandium-doped gallium nitride thin films sputtered using a metal interlayer for piezo MEMS - Uehara, Masato; Mizuno, Takaaki; Aida, Yasuhiro; Yamada, Hiroshi; Umeda, Keiichi; Akiyama, Morito (Applied physics letters, 2019)
Keywords: Aluminum; Applied physics; Electronics; Gallium nitrides; Interlayers; Mechanical systems; Microelectromechanical systems; Piezoelectricity; Polarity; Q factors; Scandium; Single crystals; Thin films; Wurtzite