APA (7th ed.) Citation

Uehara, M., Mizuno, T., Aida, Y., Yamada, H., Umeda, K., & Akiyama, M. (2019). Increase in the piezoelectric response of scandium-doped gallium nitride thin films sputtered using a metal interlayer for piezo MEMS. Applied physics letters, 114(1), . https://doi.org/10.1063/1.5066613

Chicago Style (17th ed.) Citation

Uehara, Masato, Takaaki Mizuno, Yasuhiro Aida, Hiroshi Yamada, Keiichi Umeda, and Morito Akiyama. "Increase in the Piezoelectric Response of Scandium-doped Gallium Nitride Thin Films Sputtered Using a Metal Interlayer for Piezo MEMS." Applied Physics Letters 114, no. 1 (2019). https://doi.org/10.1063/1.5066613.

MLA (9th ed.) Citation

Uehara, Masato, et al. "Increase in the Piezoelectric Response of Scandium-doped Gallium Nitride Thin Films Sputtered Using a Metal Interlayer for Piezo MEMS." Applied Physics Letters, vol. 114, no. 1, 2019, https://doi.org/10.1063/1.5066613.