Effect of phase transition on the piezoelectric properties of scandium-alloyed gallium nitride

In this study, the piezoelectric properties of scandium-alloyed gallium nitride (ScGaN), which is expected to be applied to microelectromechanical systems devices, are evaluated by first-principles calculations. The piezoelectric constant (d33) of GaN is found to increase by up to approximately 30 t...

Full description

Saved in:
Bibliographic Details
Published inJournal of applied physics Vol. 135; no. 16
Main Authors Hirata, Kenji, Ikemoto, Yu, Uehara, Masato, Yamada, Hiroshi, Anggraini, Sri Ayu, Akiyama, Morito
Format Journal Article
LanguageEnglish
Published Melville American Institute of Physics 28.04.2024
Subjects
Online AccessGet full text

Cover

Loading…