Giant increase in piezoelectric coefficient of AlN by Mg-Nb simultaneous addition and multiple chemical states of Nb

• Published in: Applied physics letters Vol. 111; no. 11
• Main Authors: Uehara, Masato, Shigemoto, Hokuto, Fujio, Yuki, Nagase, Toshimi, Aida, Yasuhiro, Umeda, Keiichi, Akiyama, Morito
• Format: Journal Article
• Language: English
• Published: Melville American Institute of Physics 11.09.2017
• Subjects: Aluminum nitride; Applied physics; Energy harvesting; Harvesters; Lead; Magnesium; Microelectromechanical systems; Niobium; Organic chemistry; Piezoelectricity; Zirconium titanates

Aluminum nitride (AlN) is one of piezoelectric materials, which are eagerly anticipated for use in microelectromechanical systems (MEMS) applications such as communication resonators, sensors, and energy harvesters. AlN is particularly excellent in generated voltage characteristics for the MEMS rath...