An Acquisition Parameter Study for Machine-Learning-Enabled Electron Backscatter Diffraction

• Published in: Microscopy and microanalysis Vol. 27; no. 4; pp. 776 - 793
• Main Authors: Kaufmann, Kevin, Vecchio, Kenneth S.
• Format: Journal Article
• Language: English
• Published: New York, USA Cambridge University Press 01.08.2021; Oxford University Press
• Subjects: Algorithms; Artificial intelligence; Artificial neural networks; Automation; Classification; Computer vision; Data collection; Deep learning; Diffraction patterns; Electron backscatter diffraction; Electron diffraction; Learning algorithms; Machine learning; Materials science; Mathematical models; Neural networks; Parameters; Performance degradation; Sensors; Software and Instrumentation; Transmission electron microscopy; machine learning; space groups; convolutional neural network; EBSD; electron diffraction
• DOI: 10.1017/S1431927621000556
• ISSN: 1431-9276

Methods within the domain of artificial intelligence are gaining traction for solving a range of materials science objectives, notably the use of deep neural networks for computer vision for the analysis of electron diffraction patterns. An important component of deploying these models is an understanding of the performance as experimental diffraction conditions are varied. This knowledge can inspire confidence in the classifications over a range of operating conditions and identify where performance is degraded. Elucidating the relative impact of each parameter will suggest the most important parameters to vary during the collection of future training data. Knowing which data collection efforts to prioritize is of concern given the time required to collect or simulate vast libraries of diffraction patterns for a wide variety of materials without considering varying any parameters. In this work, five parameters, frame averaging, detector tilt, sample-to-detector distance, accelerating voltage, and pattern resolution, essential to electron diffraction are individually varied during the collection of electron backscatter diffraction patterns to explore the effect on the classifications produced by a deep neural network trained from diffraction patterns captured using a fixed set of parameters. The model is shown to be resilient to nearly all the individual changes examined here.