Endpoint Detection Based on Optical Method in Chemical Mechanical Polishing - Tian, Fangxin; Wang, Tongqing; Lu, Xinchun (Micromachines (Basel), 2023)
Keywords: Aluminum; Chemical-mechanical polishing; Design optimization; endpoint detection; Kinematics; Lasers; Methods; Morphology; Nonuniformity; Optical measurement; optical trace; Optics; Process controls; Sensors; Thin films