APA (7th ed.) Citation

Tian, F., Wang, T., & Lu, X. (2023). Endpoint Detection Based on Optical Method in Chemical Mechanical Polishing. Micromachines (Basel), 14(11), 2053. https://doi.org/10.3390/mi14112053

Chicago Style (17th ed.) Citation

Tian, Fangxin, Tongqing Wang, and Xinchun Lu. "Endpoint Detection Based on Optical Method in Chemical Mechanical Polishing." Micromachines (Basel) 14, no. 11 (2023): 2053. https://doi.org/10.3390/mi14112053.

MLA (9th ed.) Citation

Tian, Fangxin, et al. "Endpoint Detection Based on Optical Method in Chemical Mechanical Polishing." Micromachines (Basel), vol. 14, no. 11, 2023, p. 2053, https://doi.org/10.3390/mi14112053.