Machine-Learning-Based Hotspot Detection Using Topological Classification and Critical Feature Extraction - Yen-Ting Yu; Geng-He Lin; Jiang, Iris Hui-Ru; Chiang, Charles (IEEE transactions on computer-aided design of integrated circuits and systems, 2015)
Keywords: Accuracy; Classification; Clips; Computer aided design; Design engineering; Design for manufacturability; Feature extraction; fuzzy pattern matching; Hot spots; hotspot detection; Kernel; Layout; Lithography; lithography hotspot; machine learning; support vector machine; Support vector machines; Topology; Training; fuzzy pattern matching; hotspot detection; machine learning; Design for manufacturability; support vector machine (SVM); lithography hotspot