Theory, technology and applications of piezoresistive sensors: A review

• Published in: Sensors and actuators. A. Physical. Vol. 281; pp. 156 - 175
• Main Authors: Fiorillo, A.S., Critello, C.D., Pullano, S.A.
• Format: Journal Article
• Language: English
• Published: Lausanne Elsevier B.V 01.10.2018; Elsevier BV
• Subjects: Circuit design; Electronic circuits; Metals; Micromachining; Piezoresistance; Piezoresistive devices; Polymers; Pressure gauges; Semiconductors; Sensors; Strain; Tactile sensors; Technology; Theory; Thick film sensors; Thin film sensors; αi, βi, γi; Ԑ; ℑ; Sensors; Polymers; Electronic circuits; Semiconductors; ψn; Thick film sensors; Ψ; Strain; α; δ; CMRR; ε; η; μ; Pressure gauges; ν; Piezoresistance; A; ρ; B; Ad; σ; D; τ; Piezoresistive devices; E; F; Metals; H; I; ω; K; L; ϑ; R; T; U; V; Tactile sensors; W; X; GF; σl, σt; Micromachining; Thin film sensors; ACM; m; n; πij; p; q; s

Sensors based on the detection of small resistance variations are universally recognized as piezoresistive. Being one of the simplest, most common and most investigated classes of sensors, continuous efforts are focused on creating improved devices with higher performance that can be used in many co...