Electrical Characterization of Capacitively Coupled Radio Frequency Discharges in Hydrogen

• Published in: Plasma processes and polymers Vol. 4; no. S1; pp. S937 - S941
• Main Authors: Marques, Luís S. A., Jolly, Jacques, Alves, Luís L.
• Format: Journal Article
• Language: English
• Published: Weinheim WILEY-VCH Verlag 01.04.2007; WILEY‐VCH Verlag
• Subjects: hydrogen; plasma enhanced chemical vapor deposition (PECVD); radio frequency glow discharge (RFGD); scaling laws

This work presents modeling and experimental results for the electrical characterization of capacitively coupled radio frequency (rf) discharges in hydrogen. A two‐dimensional, time‐dependent fluid model is used to describe the dynamics of electrons and positive ions H+, H 2+, and H 3+ at different...