On-machine surface measurement and applications for ultra-precision machining: a state-of-the-art review
Surface measurement is essential to enhance accuracy and efficiency in ultra-precision machining. In order to increase the measurement availability and efficiency, offline lab-based solutions are shifting towards the use of surface metrology upon manufacturing platforms. With the lack of remounting...
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| Published in | International journal of advanced manufacturing technology Vol. 104; no. 1-4; pp. 831 - 847 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
London
Springer London
01.09.2019
Springer Nature B.V |
| Subjects | |
| Online Access | Get full text |
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| Abstract | Surface measurement is essential to enhance accuracy and efficiency in ultra-precision machining. In order to increase the measurement availability and efficiency, offline lab-based solutions are shifting towards the use of surface metrology upon manufacturing platforms. With the lack of remounting errors, on-machine surface measurement (OMSM) allows the deterministic assessment of manufactured surfaces just-in-time and also provides valuable feedback to the process control of ultra-precision machining. This paper is aimed at reviewing the state-of-the-art OMSM and applications in the ultra-precision machining process. The benefits and considerations on the integration of metrology are discussed. The merits and limitations among different OMSM types are compared as well. Finally, the challenges and outlook of the ultra-precision machining-metrology integration are highlighted. |
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| AbstractList | Surface measurement is essential to enhance accuracy and efficiency in ultra-precision machining. In order to increase the measurement availability and efficiency, offline lab-based solutions are shifting towards the use of surface metrology upon manufacturing platforms. With the lack of remounting errors, on-machine surface measurement (OMSM) allows the deterministic assessment of manufactured surfaces just-in-time and also provides valuable feedback to the process control of ultra-precision machining. This paper is aimed at reviewing the state-of-the-art OMSM and applications in the ultra-precision machining process. The benefits and considerations on the integration of metrology are discussed. The merits and limitations among different OMSM types are compared as well. Finally, the challenges and outlook of the ultra-precision machining-metrology integration are highlighted. |
| Author | Wang, Bo Tong, Zhen Blunt, Liam Jiang, Xiangqian Li, Duo |
| Author_xml | – sequence: 1 givenname: Duo orcidid: 0000-0001-7382-1836 surname: Li fullname: Li, Duo email: duo.kevin.li@gmail.com organization: EPSRC Future Metrology Hub, University of Huddersfield, Centre for Precision Engineering, Harbin Institute of Technology – sequence: 2 givenname: Bo surname: Wang fullname: Wang, Bo organization: Centre for Precision Engineering, Harbin Institute of Technology – sequence: 3 givenname: Zhen surname: Tong fullname: Tong, Zhen organization: EPSRC Future Metrology Hub, University of Huddersfield – sequence: 4 givenname: Liam surname: Blunt fullname: Blunt, Liam organization: EPSRC Future Metrology Hub, University of Huddersfield – sequence: 5 givenname: Xiangqian surname: Jiang fullname: Jiang, Xiangqian organization: EPSRC Future Metrology Hub, University of Huddersfield |
| BookMark | eNp9kMtOJCEUQInRxPbxA65IZo1zKYpHzW5i1DExceOe3KbAxnRTNUDPZP5etCYxcdErCDnnAueMHKcpeUKuOFxzAP29AHANDPjAQAxaM3NEVrwXggng8pisoFOGCa3MKTkr5bXhiiuzIpunxHboNjF5WvY5oPN057Ft_c6nSjGNFOd5Gx3WOKVCw5Tpflszsjl7F0s7pMuAmF5-UKSlYvVsCqxuPMNcafZ_ov97QU4Cbou__L-ek-e72-ebX-zx6f7h5ucjc2KAytbCB-Wk80EqMw4A_RpcPw7YDUo70EpyxBAQgSNfm04E3av1KHQnx15wcU6-LWPnPP3e-1Lt67TPqd1ou34Ao6WU4iDVGaEHLXtolFkol6dSsg_WxfqRoX0_bi0H-x7fLvFti28_4lvT1O6LOue4w_zvsCQWqTQ4vfj8-aoD1htmvpmE |
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| ContentType | Journal Article |
| Copyright | Springer-Verlag London Ltd., part of Springer Nature 2019 The International Journal of Advanced Manufacturing Technology is a copyright of Springer, (2019). All Rights Reserved. Springer-Verlag London Ltd., part of Springer Nature 2019. |
| Copyright_xml | – notice: Springer-Verlag London Ltd., part of Springer Nature 2019 – notice: The International Journal of Advanced Manufacturing Technology is a copyright of Springer, (2019). All Rights Reserved. – notice: Springer-Verlag London Ltd., part of Springer Nature 2019. |
| DBID | AAYXX CITATION 8FE 8FG ABJCF AFKRA BENPR BGLVJ CCPQU DWQXO HCIFZ L6V M7S PHGZM PHGZT PKEHL PQEST PQGLB PQQKQ PQUKI PRINS PTHSS |
| DOI | 10.1007/s00170-019-03977-8 |
| DatabaseName | CrossRef ProQuest SciTech Collection ProQuest Technology Collection Materials Science & Engineering Collection ProQuest Central UK/Ireland ProQuest Central Technology Collection ProQuest One ProQuest Central Korea SciTech Premium Collection ProQuest Engineering Collection ProQuest Engineering Database ProQuest Central Premium ProQuest One Academic ProQuest One Academic Middle East (New) ProQuest One Academic Eastern Edition (DO NOT USE) ProQuest One Applied & Life Sciences ProQuest One Academic ProQuest One Academic UKI Edition ProQuest Central China Engineering collection |
| DatabaseTitle | CrossRef Engineering Database Technology Collection ProQuest One Academic Middle East (New) ProQuest One Academic Eastern Edition SciTech Premium Collection ProQuest One Community College ProQuest Technology Collection ProQuest SciTech Collection ProQuest Central China ProQuest Central ProQuest One Applied & Life Sciences ProQuest Engineering Collection ProQuest One Academic UKI Edition ProQuest Central Korea Materials Science & Engineering Collection ProQuest One Academic ProQuest Central (New) Engineering Collection ProQuest One Academic (New) |
| DatabaseTitleList | Engineering Database Engineering Database |
| Database_xml | – sequence: 1 dbid: 8FG name: ProQuest Technology Collection url: https://search.proquest.com/technologycollection1 sourceTypes: Aggregation Database |
| DeliveryMethod | fulltext_linktorsrc |
| Discipline | Engineering |
| EISSN | 1433-3015 |
| EndPage | 847 |
| ExternalDocumentID | 10_1007_s00170_019_03977_8 |
| GrantInformation_xml | – fundername: UK’s Engineering and Physical Sciences Research Council grantid: EP/P006930/1 |
| GroupedDBID | -5B -5G -BR -EM -~C .86 .VR 06D 0R~ 0VY 123 1N0 203 29J 29~ 2J2 2JN 2JY 2KG 2KM 2LR 2~H 30V 4.4 406 408 409 40D 40E 5GY 5VS 67Z 6NX 8FE 8FG 8TC 8UJ 95- 95. 95~ 96X AAAVM AABHQ AACDK AAHNG AAIAL AAJBT AAJKR AANZL AARTL AASML AATNV AATVU AAUYE AAWCG AAYIU AAYQN AAYZH ABAKF ABBBX ABBXA ABDBF ABDZT ABECU ABFTD ABFTV ABHQN ABJCF ABJNI ABJOX ABKCH ABKTR ABMNI ABMQK ABNWP ABQBU ABSXP ABTEG ABTHY ABTKH ABTMW ABWNU ABXPI ACAOD ACDTI ACGFS ACHSB ACHXU ACIWK ACKNC ACMDZ ACMLO ACOKC ACOMO ACPIV ACUHS ACZOJ ADHHG ADHIR ADINQ ADKNI ADKPE ADMLS ADTPH ADURQ ADYFF ADZKW AEFQL AEGAL AEGNC AEJHL AEJRE AEMSY AENEX AEOHA AEPYU AESKC AETLH AEVLU AEXYK AFBBN AFKRA AFLOW AFQWF AFWTZ AFZKB AGAYW AGDGC AGMZJ AGQEE AGQMX AGRTI AGWIL AGWZB AGYKE AHAVH AHBYD AHSBF AHYZX AIAKS AIGIU AIIXL AILAN AITGF AJRNO AJZVZ ALMA_UNASSIGNED_HOLDINGS ALWAN AMKLP AMXSW AMYLF AMYQR AOCGG ARMRJ ASPBG AVWKF AXYYD AYJHY AZFZN B-. B0M BA0 BDATZ BENPR BGLVJ BGNMA BSONS CCPQU CS3 CSCUP DDRTE DL5 DNIVK DPUIP DU5 EAD EAP EAS EBLON EBS EIOEI EJD EMK EPL ESBYG ESX FEDTE FERAY FFXSO FIGPU FINBP FNLPD FRRFC FSGXE FWDCC GGCAI GGRSB GJIRD GNWQR GQ6 GQ7 GQ8 GXS HCIFZ HF~ HG5 HG6 HMJXF HQYDN HRMNR HVGLF HZ~ I-F I09 IHE IJ- IKXTQ ITM IWAJR IXC IZIGR IZQ I~X I~Z J-C J0Z JBSCW JCJTX JZLTJ KDC KOV L6V LAS LLZTM M4Y M7S MA- ML~ N9A NB0 NPVJJ NQJWS NU0 O93 O9G O9I O9J OAM P19 P9P PF0 PT4 PT5 PTHSS QOK QOS R89 R9I RHV RNS ROL RPX RSV S16 S27 S3B SAP SDH SDM SEG SHX SISQX SJYHP SNE SNPRN SNX SOHCF SOJ SPISZ SRMVM SSLCW STPWE SZN T13 TN5 TSG TSK TSV TUC TUS U2A UG4 UOJIU UTJUX UZXMN VC2 VFIZW W23 W48 WK8 YLTOR Z45 Z5O Z7R Z7S Z7V Z7W Z7X Z7Y Z7Z Z81 Z83 Z85 Z86 Z88 Z8M Z8N Z8P Z8Q Z8R Z8S Z8T Z8U Z8V Z8W Z8Z Z92 ZMTXR _50 ~8M ~A9 ~EX -XW -XX -Y2 1SB 28- 2P1 2VQ 5QI 9M8 AAPKM AARHV AAYTO AAYXX ABBRH ABDBE ABFSG ABQSL ABULA ACBXY ACSTC ADHKG ADQRH ADRFC AEBTG AEFIE AEKMD AEZWR AFDZB AFEXP AFGCZ AFHIU AFOHR AGGDS AGJBK AGQPQ AHPBZ AHWEU AIXLP AJBLW ARCEE ATHPR AYFIA BBWZM CAG CITATION COF H13 KOW N2Q NDZJH O9- PHGZM PHGZT R4E RIG RNI RZK S1Z S26 S28 SCLPG SCV T16 ZY4 ABRTQ DWQXO PKEHL PQEST PQGLB PQQKQ PQUKI PRINS |
| ID | FETCH-LOGICAL-c390t-b3ef6c5cef568d9004b0c4d9a2967c07651aaffaa01a1b823f746bd3725d4313 |
| IEDL.DBID | BENPR |
| ISSN | 0268-3768 |
| IngestDate | Fri Jul 25 11:05:56 EDT 2025 Fri Jul 25 11:05:15 EDT 2025 Tue Jul 01 00:40:19 EDT 2025 Thu Apr 24 22:58:50 EDT 2025 Fri Feb 21 02:31:34 EST 2025 |
| IsPeerReviewed | true |
| IsScholarly | true |
| Issue | 1-4 |
| Keywords | Machining-metrology integration Metrology On-machine surface measurement Ultra-precision machining |
| Language | English |
| LinkModel | DirectLink |
| MergedId | FETCHMERGED-LOGICAL-c390t-b3ef6c5cef568d9004b0c4d9a2967c07651aaffaa01a1b823f746bd3725d4313 |
| Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 content type line 14 ObjectType-Literature Review-2 ObjectType-Feature-2 |
| ORCID | 0000-0001-7382-1836 |
| PQID | 2283797540 |
| PQPubID | 2044010 |
| PageCount | 17 |
| ParticipantIDs | proquest_journals_2490875553 proquest_journals_2283797540 crossref_citationtrail_10_1007_s00170_019_03977_8 crossref_primary_10_1007_s00170_019_03977_8 springer_journals_10_1007_s00170_019_03977_8 |
| ProviderPackageCode | CITATION AAYXX |
| PublicationCentury | 2000 |
| PublicationDate | 2019-09-01 |
| PublicationDateYYYYMMDD | 2019-09-01 |
| PublicationDate_xml | – month: 09 year: 2019 text: 2019-09-01 day: 01 |
| PublicationDecade | 2010 |
| PublicationPlace | London |
| PublicationPlace_xml | – name: London – name: Heidelberg |
| PublicationTitle | International journal of advanced manufacturing technology |
| PublicationTitleAbbrev | Int J Adv Manuf Technol |
| PublicationYear | 2019 |
| Publisher | Springer London Springer Nature B.V |
| Publisher_xml | – name: Springer London – name: Springer Nature B.V |
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| SSID | ssj0016168 ssib034539549 ssib019759004 ssib029851711 |
| Score | 2.4495401 |
| SecondaryResourceType | review_article |
| Snippet | Surface measurement is essential to enhance accuracy and efficiency in ultra-precision machining. In order to increase the measurement availability and... |
| SourceID | proquest crossref springer |
| SourceType | Aggregation Database Enrichment Source Index Database Publisher |
| StartPage | 831 |
| SubjectTerms | CAE) and Design Computer-Aided Engineering (CAD Engineering Industrial and Production Engineering Machine shops Machine tool industry Mechanical Engineering Media Management Metrology Original Article Precision machining Process controls State-of-the-art reviews |
| SummonAdditionalLinks | – databaseName: SpringerLink Journals (ICM) dbid: U2A link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwlV1LSwMxEA5aL3oQn1itkoM3DewjyWa9FbEUQb200NuSJx7abdlu_79J9lWlCp43m8Dky-abnflmALjHliRHggWIhypBWCcScUYpMlqaQGEjhXRq5Ld3Op7i1xmZ1aKwdZPt3oQk_Ze6Fbv5Ui_W9U1R4FgLYvvggFjf3SVyTaNhg6IwTVwnzBZlUeraz3cojjGJq9hWHWugoRfMWWeEuePGamnN7jW_X18dJ_0RRvW30-gEHNe0Eg4rHJyCPZ2fgaOtYoPn4PMjRwufOqnhelMYLjVcdH8IIc8V3A5nQ0tn4WZeFhytiroTD6wmsPM9QQ69GAktDbIk0mXYwUoHcwEmo5fJ8xjVfRaQjNOgRCLWhkoitSGUKWc7EUisUh6lNJFBQknIuTGcByEPBYtik2AqVJxERFn-EV-CXr7M9RWAwvKz0Hq9GCuKXetPexdiTY2kikWaiD4IG-tlsq5B7lphzLO2erK3eGYtnnmLZ6wPHtp3VlUFjj9HD5pNyerTuM58iR8LCxzsfuyCnwkhJO6Dx2Yfu8e_L3b9v-E34DDyUHIZagPQK4uNvrWUphR3HsFfrkDnPw priority: 102 providerName: Springer Nature |
| Title | On-machine surface measurement and applications for ultra-precision machining: a state-of-the-art review |
| URI | https://link.springer.com/article/10.1007/s00170-019-03977-8 https://www.proquest.com/docview/2283797540 https://www.proquest.com/docview/2490875553 |
| Volume | 104 |
| hasFullText | 1 |
| inHoldings | 1 |
| isFullTextHit | |
| isPrint | |
| link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV3LjtMwFL2i7QYWiNeIQqm8YMdYJI7tOGxQQW1HIGYQmkqdVeSnWMykpY__x3acdkDQbZw40vWxfez7OABvqSfJRIkMy9yUmNpSYyk4x85qlxnqtNIhG_nbJb9Y0C9LtkwXbtsUVtmtiXGhNisd7sjfk-ChKhljxcf1LxxUo4J3NUlo9GDgl2Ah-jD4NL38_qNDVF6VQRXzgDhSBSn6I6ILyorWz5X8DjyPyXP-YCLC1BMpzSYm28VSM_7oXeEssCYs_tzKjvz0L5dq3KlmT-Bxopho0mLiKTywzTN4dK_w4HP4edXguxhGadF2v3FSW3R3vC1EsjHovmsbeWqL9re7jcTrTVLlQW0Hvr8PSKKYmIRXDntCGaLtUJsT8wKuZ9Przxc4aS5gXVTZDqvCOq6Zto5xYYLtVKapqSSpeKmzkrNcSuekzHKZK0EKV1KuTFESZjwXKc6g36wa-xKQ8lwt9ydgSg2nQQbU74vUcqe5EcQyNYS8s16tUz3yIItxWx8qKUeL197idbR4LYbw7vDNuq3GcfLtUTcodZqZ2zqW-_GwoNm_mw8wG8J5N47H5v__7NXp3l7DQxKhE6LTRtDfbfb2jaczOzWGnpjNxzCYzG--TscJwf7pgkx-A0iJ7xs |
| linkProvider | ProQuest |
| linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lj9QwDLaW5QAcEE8xsEAOcIKINk3SFAkhBAyz7IPLIO0tylMcdjvDPIT4UfxHnLSdWRDsbc9tXcn5EtuxPxvgGUcnmVlVUFP6mvJQO2qUlDQGFwvPo7MusZGPjuXkK_98Ik524NfAhUlllcOZmA9qP3PpjvwVSxmqWghRvZ1_p2lqVMquDiM0OlgchJ8_MGRbvtn_gOv7nLHxx-n7Ce2nClCH8f2K2ipE6YQLUUjlGwSJLRz3jWGNrB2G9aI0JkZjitKUVrEq1lxaX9VMeLS2FYq9Ald5hYY8EdPHnwb4lk2dRnBu4M2aNPd-u30qLqouqdYnOWSZmXoYBam0z1XP6cnMvtzXBuP8hhbJRaPqT7u5dYb_yt9mszi-BTd7f5a86wB4G3ZCewdunOtyeBe-fWnpWa7ZDGS5XkTjAjnbXk0S03pyPo9O0I8m69PVwtD5oh8BRDoBKO81MSSzoOgsUvReU2kf6Qg492B6GUtxH3bbWRseALHoGJYYbnPuJU8zR9EI8yCjk16xIOwIykF72vXNz9MMjlO9aducNa5R4zprXKsRvNh8M-9af1z49t6wKLo_BpY69xZCWPDi3483mB7By2Edt4___7OHF0t7Ctcm06NDfbh_fPAIrrMMo1QWtwe7q8U6PEY_amWfZPQS0Je8W34DBgom4w |
| linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwtV1Lb9QwEB6VIiE4IJ5ioYAPcAKriWM7DhKHirJqKRQOrdSb5ad6aNPVblaIX8VfZOwkuwUVJA49x3EUz0zmm8x8MwCvOIJkZlVBTelrykPtqFFS0hhcLDyPzrrERv5yKPeO-acTcbIBP0cuTK52H1OSPachdWlqu-2Zj9sr4ltu-4JhcEOLhGCoGsoqD8KP7xi0Ld7v76KEXzM2_Xj0YY8OcwWowwi_o7YKUTrhQhRS-QbVxBaO-8awRtYOA3tRGhOjMUVpSqtYFWsura9qJjz62wq3vQE3eSIfowEds51RgcumTkM4VwrOGsQz9dqAKi6qPq02pDlkmbl6GAepZOlqYPVc_Yq_e841HP4jg5sd4_Qe3B0QLdnpVfA-bIT2Ady51OfwIZx-bel5rtoMZLGcR-MCOV__nCSm9eRyJp0gkibLs25u6Gw-DAEi_Qa43ztiSOZB0YtIEb-m4j7SU3AewdF1iOIxbLYXbXgCxCI0LDHg5txLnqaOohvmQUYnvWJB2AmU4-lpN7Q_T1M4zvSqcXM-cY0nrvOJazWBN6t7Zn3zj3-u3hqFoocPwULn7kKoFry4-nLKu9ZCiGoCb0c5ri___WFP_2_5S7j1bXeqP-8fHjyD2yxrVaqT24LNbr4MzxFYdfZFVmYC-pqN5xctyygi |
| openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=On-machine+surface+measurement+and+applications+for+ultra-precision+machining%3A+a+state-of-the-art+review&rft.jtitle=International+journal+of+advanced+manufacturing+technology&rft.au=Li%2C+Duo&rft.au=Wang%2C+Bo&rft.au=Tong+Zhen&rft.au=Blunt%2C+Liam&rft.date=2019-09-01&rft.pub=Springer+Nature+B.V&rft.issn=0268-3768&rft.eissn=1433-3015&rft.volume=104&rft.issue=1-4&rft.spage=831&rft.epage=847&rft_id=info:doi/10.1007%2Fs00170-019-03977-8 |
| thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=0268-3768&client=summon |
| thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=0268-3768&client=summon |
| thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=0268-3768&client=summon |