Damage buildup in semiconductors bombarded by low-energy ions
The damage buildup in Ge and GaAs bombarded at room and elevated temperatures by keV Ne + and Ar + ions has been studied. Results show that the accumulation of disorder can be considered as a planar growth of an amorphous layer proceeding from the surface. A retardation of amorphous layer growth is...
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Published in | Thin solid films Vol. 515; no. 1; pp. 118 - 121 |
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Language | English |
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Elsevier B.V
25.09.2006
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Abstract | The damage buildup in Ge and GaAs bombarded at room and elevated temperatures by keV Ne
+ and Ar
+ ions has been studied. Results show that the accumulation of disorder can be considered as a planar growth of an amorphous layer proceeding from the surface. A retardation of amorphous layer growth is experimentally observed in Ge for low ion doses. Results (for the case of room temperature irradiation of GaAs and for all the cases of irradiation of Ge except for the case of irradiation by Ar
+ ions with high ion flux density) are explained based on the diffusion of mobile point defects to the surface with a subsequent interface segregation process. Calculations based on this model are in good agreement with experimental data. |
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AbstractList | The damage buildup in Ge and GaAs bombarded at room and elevated temperatures by keV Ne
+ and Ar
+ ions has been studied. Results show that the accumulation of disorder can be considered as a planar growth of an amorphous layer proceeding from the surface. A retardation of amorphous layer growth is experimentally observed in Ge for low ion doses. Results (for the case of room temperature irradiation of GaAs and for all the cases of irradiation of Ge except for the case of irradiation by Ar
+ ions with high ion flux density) are explained based on the diffusion of mobile point defects to the surface with a subsequent interface segregation process. Calculations based on this model are in good agreement with experimental data. The damage buildup in Ge and GaAs bombarded at room and elevated temperatures by keV Ne(+)and Ar(+)ions has been studied. Results show that the accumulation of disorder can be considered as a planar growth of an amorphous layer proceeding from the surface. A retardation of amorphous layer growth is experimentally observed in Ge for low ion doses. Results (for the case of room temperature irradiation of GaAs and for all the cases of irradiation of Ge except for the case of irradiation by Ar(+)ions with high ion flux density) are explained based on the diffusion of mobile point defects to the surface with a subsequent interface segregation process. Calculations based on this model are in good agreement with experimental data. |
Author | Titov, A.I. Belyakov, V.S. Azarov, A.Yu |
Author_xml | – sequence: 1 givenname: A.I. surname: Titov fullname: Titov, A.I. email: titov@phtf.stu.neva.ru organization: Department of Physical Electronics, Saint-Petersburg State Polytechnical University, ul. Polytechnicheskaya 29, Saint-Petersburg 195251, Russian Federation – sequence: 2 givenname: V.S. surname: Belyakov fullname: Belyakov, V.S. organization: Department of Physical Electronics, Saint-Petersburg State Polytechnical University, ul. Polytechnicheskaya 29, Saint-Petersburg 195251, Russian Federation – sequence: 3 givenname: A.Yu surname: Azarov fullname: Azarov, A.Yu organization: Research and Production Company Electron-Optronic, pr. Morisa Toreza 68, Saint-Petersburg 194223, Russian Federation |
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References | The International Technology Roadmap for Semiconductors, Semiconductor Industry Association (2003) Kimura, Agarwal, Toyofuku, Nakajima, Gossman (bib9) 1999; 148 Hu (bib18) 1991; 70 Andersen, Ziegler (bib14) 1977; vol. 3 Titov, Belyakov (bib15) 1996; 138 Ravi (bib16) 1981 Daw, Windl, Carlson, Laudon, Masquelier (bib20) 2001; 64 Lohner, Fried, Khanh, Petrik, Wormeester, El-Sherbiny (bib10) 1999; 147 van Dillen, Siem, Polman (bib22) 2004; 85 Yu, Cardona (bib17) 2005 Brongersma, Snoeks, Polman (bib21) 1997; 71 Biersack, Haggmark (bib13) 1980; 174 Brown, Williams (bib23) 1997; 81 Ahn, Kennel, Plummer, Tiller (bib19) 1988; 64 Priolo, Spinella, Rimini (bib25) 1990; 41 Karmakov, Chakarov, Konova (bib6) 2003; 211 Colligon, Kheyrandish, Carter, Simmons (bib1) 1995; 46 Titov, Kucheyev (bib26) 2000; 168 . Titov, Belyakov, Azarov (bib11) 2003; 212 Menzel, Gärtner, Wesch, Hobert (bib24) 2000; 88 Van den Berg, Armour, Zhang, Whelan, Ohno, Wang, Cullis, Collart, Goldberg, Bailey, Noakes (bib7) 2002; 20 Werner, van den Berg, Armour, Vandervorst, Collart, Goldberg, Bailey, Noakes (bib4) 2004; 216 Feldman, Mayer (bib3) 1986 Fukarek, Moller, Hatzopoulos, Armour, Van den Berg (bib8) 1997; 127/128 Swanson, Parsons, Hoelke (bib12) 1971; 9 Van den Berg, Zhang, Whelan, Armour, Goldberg, Bailey, Noakes (bib5) 2001; 183 Menzel (10.1016/j.tsf.2005.12.048_bib24) 2000; 88 van Dillen (10.1016/j.tsf.2005.12.048_bib22) 2004; 85 Kimura (10.1016/j.tsf.2005.12.048_bib9) 1999; 148 Colligon (10.1016/j.tsf.2005.12.048_bib1) 1995; 46 Lohner (10.1016/j.tsf.2005.12.048_bib10) 1999; 147 Biersack (10.1016/j.tsf.2005.12.048_bib13) 1980; 174 Ravi (10.1016/j.tsf.2005.12.048_bib16) 1981 Titov (10.1016/j.tsf.2005.12.048_bib11) 2003; 212 Titov (10.1016/j.tsf.2005.12.048_bib26) 2000; 168 Brongersma (10.1016/j.tsf.2005.12.048_bib21) 1997; 71 10.1016/j.tsf.2005.12.048_bib2 Van den Berg (10.1016/j.tsf.2005.12.048_bib7) 2002; 20 Fukarek (10.1016/j.tsf.2005.12.048_bib8) 1997; 127/128 Karmakov (10.1016/j.tsf.2005.12.048_bib6) 2003; 211 Titov (10.1016/j.tsf.2005.12.048_bib15) 1996; 138 Yu (10.1016/j.tsf.2005.12.048_bib17) 2005 Hu (10.1016/j.tsf.2005.12.048_bib18) 1991; 70 Van den Berg (10.1016/j.tsf.2005.12.048_bib5) 2001; 183 Andersen (10.1016/j.tsf.2005.12.048_bib14) 1977; vol. 3 Brown (10.1016/j.tsf.2005.12.048_bib23) 1997; 81 Ahn (10.1016/j.tsf.2005.12.048_bib19) 1988; 64 Daw (10.1016/j.tsf.2005.12.048_bib20) 2001; 64 Werner (10.1016/j.tsf.2005.12.048_bib4) 2004; 216 Swanson (10.1016/j.tsf.2005.12.048_bib12) 1971; 9 Priolo (10.1016/j.tsf.2005.12.048_bib25) 1990; 41 Feldman (10.1016/j.tsf.2005.12.048_bib3) 1986 |
References_xml | – volume: 127/128 start-page: 879 year: 1997 ident: bib8 publication-title: Nucl. Instrum. Methods B contributor: fullname: Van den Berg – volume: 41 start-page: 5235 year: 1990 ident: bib25 publication-title: Phys. Rev., B contributor: fullname: Rimini – volume: 216 start-page: 67 year: 2004 ident: bib4 publication-title: Nucl. Instrum. Methods B contributor: fullname: Noakes – volume: 138 start-page: 231 year: 1996 ident: bib15 publication-title: Rad. Effects contributor: fullname: Belyakov – start-page: 307 year: 1986 ident: bib3 publication-title: Fundamentals of Surface and Thin Film Analysis contributor: fullname: Mayer – volume: 70 start-page: R53 year: 1991 ident: bib18 publication-title: J. Appl. Phys. contributor: fullname: Hu – start-page: 396 year: 1981 ident: bib16 publication-title: Imperfections and Impurities in Semiconductor Silicon contributor: fullname: Ravi – volume: 148 start-page: 284 year: 1999 ident: bib9 publication-title: Nucl. Instrum. Methods B contributor: fullname: Gossman – volume: 9 start-page: 249 year: 1971 ident: bib12 publication-title: Rad. Effects contributor: fullname: Hoelke – volume: 64 start-page: 4914 year: 1988 ident: bib19 publication-title: J. Appl. Phys. contributor: fullname: Tiller – volume: 174 start-page: 257 year: 1980 ident: bib13 publication-title: Nucl. Instrum. Methods contributor: fullname: Haggmark – volume: 212 start-page: 169 year: 2003 ident: bib11 publication-title: Nucl. Instrum. Methods B contributor: fullname: Azarov – volume: 85 start-page: 389 year: 2004 ident: bib22 publication-title: Appl. Phys. Lett. contributor: fullname: Polman – volume: 168 start-page: 375 year: 2000 ident: bib26 publication-title: Nucl. Instrum. Methods B contributor: fullname: Kucheyev – volume: 46 start-page: 919 year: 1995 ident: bib1 publication-title: Vacuum contributor: fullname: Simmons – volume: 81 start-page: 7681 year: 1997 ident: bib23 publication-title: J. Appl. Phys. contributor: fullname: Williams – volume: 71 start-page: 1628 year: 1997 ident: bib21 publication-title: Appl. Phys. Lett. contributor: fullname: Polman – volume: 211 start-page: 270 year: 2003 ident: bib6 publication-title: Appl. Surf. Sci. contributor: fullname: Konova – start-page: 250 year: 2005 ident: bib17 publication-title: Fundamentals of Semiconductors: Physics and Materials Properties contributor: fullname: Cardona – volume: 183 start-page: 154 year: 2001 ident: bib5 publication-title: Nucl. Instrum. Methods B contributor: fullname: Noakes – volume: 147 start-page: 90 year: 1999 ident: bib10 publication-title: Nucl. Instrum Methods B contributor: fullname: El-Sherbiny – volume: 88 start-page: 5658 year: 2000 ident: bib24 publication-title: J. Appl. Phys. contributor: fullname: Hobert – volume: vol. 3 year: 1977 ident: bib14 publication-title: The Stopping and Range of Ions in Matter contributor: fullname: Ziegler – volume: 64 start-page: 045205 year: 2001 ident: bib20 publication-title: Phys. Rev., B contributor: fullname: Masquelier – volume: 20 start-page: 974 year: 2002 ident: bib7 publication-title: J. Vac. Sci. Technol., B contributor: fullname: Noakes – volume: 147 start-page: 90 year: 1999 ident: 10.1016/j.tsf.2005.12.048_bib10 publication-title: Nucl. Instrum Methods B doi: 10.1016/S0168-583X(98)00594-1 contributor: fullname: Lohner – volume: 46 start-page: 919 year: 1995 ident: 10.1016/j.tsf.2005.12.048_bib1 publication-title: Vacuum doi: 10.1016/0042-207X(95)00072-0 contributor: fullname: Colligon – volume: 70 start-page: R53 year: 1991 ident: 10.1016/j.tsf.2005.12.048_bib18 publication-title: J. Appl. Phys. doi: 10.1063/1.349282 contributor: fullname: Hu – volume: 41 start-page: 5235 year: 1990 ident: 10.1016/j.tsf.2005.12.048_bib25 publication-title: Phys. Rev., B doi: 10.1103/PhysRevB.41.5235 contributor: fullname: Priolo – volume: 71 start-page: 1628 year: 1997 ident: 10.1016/j.tsf.2005.12.048_bib21 publication-title: Appl. Phys. Lett. doi: 10.1063/1.119999 contributor: fullname: Brongersma – volume: 138 start-page: 231 year: 1996 ident: 10.1016/j.tsf.2005.12.048_bib15 publication-title: Rad. Effects doi: 10.1080/10420159608211525 contributor: fullname: Titov – volume: 64 start-page: 4914 year: 1988 ident: 10.1016/j.tsf.2005.12.048_bib19 publication-title: J. Appl. Phys. doi: 10.1063/1.342441 contributor: fullname: Ahn – volume: 174 start-page: 257 year: 1980 ident: 10.1016/j.tsf.2005.12.048_bib13 publication-title: Nucl. Instrum. Methods doi: 10.1016/0029-554X(80)90440-1 contributor: fullname: Biersack – volume: vol. 3 year: 1977 ident: 10.1016/j.tsf.2005.12.048_bib14 contributor: fullname: Andersen – volume: 81 start-page: 7681 year: 1997 ident: 10.1016/j.tsf.2005.12.048_bib23 publication-title: J. Appl. Phys. doi: 10.1063/1.365347 contributor: fullname: Brown – start-page: 307 year: 1986 ident: 10.1016/j.tsf.2005.12.048_bib3 contributor: fullname: Feldman – volume: 183 start-page: 154 year: 2001 ident: 10.1016/j.tsf.2005.12.048_bib5 publication-title: Nucl. Instrum. Methods B doi: 10.1016/S0168-583X(00)00683-2 contributor: fullname: Van den Berg – volume: 216 start-page: 67 year: 2004 ident: 10.1016/j.tsf.2005.12.048_bib4 publication-title: Nucl. Instrum. Methods B doi: 10.1016/j.nimb.2003.11.022 contributor: fullname: Werner – volume: 9 start-page: 249 year: 1971 ident: 10.1016/j.tsf.2005.12.048_bib12 publication-title: Rad. Effects doi: 10.1080/00337577108231056 contributor: fullname: Swanson – volume: 85 start-page: 389 year: 2004 ident: 10.1016/j.tsf.2005.12.048_bib22 publication-title: Appl. Phys. Lett. doi: 10.1063/1.1773927 contributor: fullname: van Dillen – volume: 88 start-page: 5658 year: 2000 ident: 10.1016/j.tsf.2005.12.048_bib24 publication-title: J. Appl. Phys. doi: 10.1063/1.1319168 contributor: fullname: Menzel – ident: 10.1016/j.tsf.2005.12.048_bib2 – volume: 212 start-page: 169 year: 2003 ident: 10.1016/j.tsf.2005.12.048_bib11 publication-title: Nucl. Instrum. Methods B doi: 10.1016/S0168-583X(03)01486-1 contributor: fullname: Titov – volume: 64 start-page: 045205 year: 2001 ident: 10.1016/j.tsf.2005.12.048_bib20 publication-title: Phys. Rev., B doi: 10.1103/PhysRevB.64.045205 contributor: fullname: Daw – start-page: 396 year: 1981 ident: 10.1016/j.tsf.2005.12.048_bib16 contributor: fullname: Ravi – volume: 148 start-page: 284 year: 1999 ident: 10.1016/j.tsf.2005.12.048_bib9 publication-title: Nucl. Instrum. Methods B doi: 10.1016/S0168-583X(98)00696-X contributor: fullname: Kimura – start-page: 250 year: 2005 ident: 10.1016/j.tsf.2005.12.048_bib17 contributor: fullname: Yu – volume: 127/128 start-page: 879 year: 1997 ident: 10.1016/j.tsf.2005.12.048_bib8 publication-title: Nucl. Instrum. Methods B doi: 10.1016/S0168-583X(97)00024-4 contributor: fullname: Fukarek – volume: 20 start-page: 974 year: 2002 ident: 10.1016/j.tsf.2005.12.048_bib7 publication-title: J. Vac. Sci. Technol., B doi: 10.1116/1.1477420 contributor: fullname: Van den Berg – volume: 211 start-page: 270 year: 2003 ident: 10.1016/j.tsf.2005.12.048_bib6 publication-title: Appl. Surf. Sci. doi: 10.1016/S0169-4332(03)00251-4 contributor: fullname: Karmakov – volume: 168 start-page: 375 year: 2000 ident: 10.1016/j.tsf.2005.12.048_bib26 publication-title: Nucl. Instrum. Methods B doi: 10.1016/S0168-583X(99)01095-2 contributor: fullname: Titov |
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Snippet | The damage buildup in Ge and GaAs bombarded at room and elevated temperatures by keV Ne
+ and Ar
+ ions has been studied. Results show that the accumulation of... The damage buildup in Ge and GaAs bombarded at room and elevated temperatures by keV Ne +and Ar +ions has been studied. Results show that the accumulation of... The damage buildup in Ge and GaAs bombarded at room and elevated temperatures by keV Ne(+)and Ar(+)ions has been studied. Results show that the accumulation of... |
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