Diagnosis of Interconnect Full Open Defects in the Presence of Fan-Out

• Published in: IEEE transactions on computer-aided design of integrated circuits and systems Vol. 30; no. 12; pp. 1911 - 1922
• Main Authors: Arumi, D., Rodriguez-Montanes, Rosa, Figueras, J., Eichenberger, S., Hora, C., Kruseman, B.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.12.2011; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: CMOS; CMOS integrated circuits; Defects; Diagnosis; Fault diagnosis; Integrated circuits; interconnect; Interconnected systems; Mathematical models; open defect; Semiconductor devices; Transistors; Voltage

The development of accurate diagnosis methodologies is important to identify process problems and achieve fast yield improvement. As open defects are becoming dominant in some CMOS technologies, their accurate diagnosis is key to improving the quality of new very large-scale integrated circuits. Wid...