Integration of stamper fabrication and design optimization of LCD Light guides using silicon-based microfeatures

• Published in: Microsystem technologies Vol. 16; no. 7; pp. 1193 - 1200
• Main Authors: Yu, Jyh-Cheng, Hsu, Pei-Kai
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Berlin/Heidelberg Springer-Verlag 01.07.2010; Springer; Springer Nature B.V
• Subjects: Accuracy; Applied sciences; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Design optimization; Design parameters; Electroforming; Electronics; Electronics and Microelectronics; Electrooptical effects; Engineering; Etching; Exact sciences and technology; Geometry; Grooves; Illumination; Injection molding; Instrumentation; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Light emitting diodes; Mechanical Engineering; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Nanotechnology; Nickel; Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation; Optical properties of bulk materials and thin films; Physics; Precision engineering, watch making; Prisms; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Silicon; Silicon wafers; Simulation; Software; SOI (semiconductors); Technical Paper; Light Emit Diode; Fuzzy Inference Engine; Root Mean Square Error; Light Guide Plate; Anchor Point; Fuzzy logic; Anisotropic etching; Display devices; Electroforming; Silicon-on-insulator; Groove; Light emitting diodes; Liquid crystal devices; Silicon; Chemical etching; Optimization; Production process

This study applies a novel fabrication process that combines anisotropic wet etching of silicon-on-insulator (SOI) wafers with electroforming to manufacture precision stampers. Micron-sized features, such as trapezoidal grooves and truncated pyramidal prisms, can be fabricated and distributed accura...