Characterization of an Integrable Single-Crystalline 3-D Tactile Sensor

• Published in: IEEE sensors journal Vol. 6; no. 4; pp. 928 - 934
• Main Authors: Vasarhelyi, G., Adam, M., Vazsonyi, E., Vizvary, Z., Kis, A., Barsony, I., Ducso, C.
• Format: Journal Article
• Language: English
• Published: New York IEEE 01.08.2006; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Arrays; Biomembranes; Bridges; Doping; Electronics; Force sensors; Mathematical analysis; Mathematical models; Mechanical sensors; Membranes; Micromachining; Piezoresistive devices; Porous-Si micromachining; Resistors; Sensors; Single crystals; Stress; Tactile; Tactile sensors; three-dimensional (3-D) force sensors

Porous-Si-micromachining technique was used for the formation of single-crystalline force-sensor elements, capable of resolving the three vector components of the loading force. Similar structures presented so far are created from deposited polycrystalline Si resistors embedded in multilayered SiO 2...