Advanced Side-Impermeability Characteristics of Fluorinated Organic-Inorganic Nanohybrid Materials for Thin Film Encapsulation
In this study, we introduce a sol-gel based fluorinated nanohybrid materials named FAGPTi to fabricate organic-inorganic hybrid thin film encapsulation (TFE) with plasma-enhanced atomic layer deposition (PEALD)-based Al 2 O 3 for optoelectronics. A systematic analysis of the FAGPTi film on various s...
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| Published in | Macromolecular research Vol. 29; no. 4; pp. 313 - 320 |
|---|---|
| Main Authors | , , , , , , , |
| Format | Journal Article |
| Language | English |
| Published |
Seoul
The Polymer Society of Korea
01.04.2021
Springer Nature B.V 한국고분자학회 |
| Subjects | |
| Online Access | Get full text |
| ISSN | 1598-5032 2092-7673 |
| DOI | 10.1007/s13233-021-9035-2 |
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| Abstract | In this study, we introduce a sol-gel based fluorinated nanohybrid materials named FAGPTi to fabricate organic-inorganic hybrid thin film encapsulation (TFE) with plasma-enhanced atomic layer deposition (PEALD)-based Al
2
O
3
for optoelectronics. A systematic analysis of the FAGPTi film on various substrates reveals that the FAGPTi films fully covered all parts of the substrate, showing low roughness, high hydrophobicity, and good flexibility. These results demonstrate that FAGPTi is able to protect water corrosive Al
2
O
3
from the outer invasion of moisture or water. Therefore, the TFE with alternatively stacked Al
2
O
3
and FAGPTi shows excellent barrier film performance as low as 6.33 × 10
−5
g m
−2
day
−1
s at accelerated conditions (60 °C and 90% RH) and high visible transmittance above 95% in four pairs. In particular, the FAGPTi films displayed advanced side impermeability, with values comparable to those of the oxide layer. Thus, we expect our systematic work with FAGPTi layers to provide insights into barrier films to advance their integration in flexible optoelectronic devices and thereby accelerate their commercialization. |
|---|---|
| AbstractList | In this study, we introduce a sol-gel based fluorinated nanohybrid materials named FAGPTi to fabricate organic-inorganic hybrid thin film encapsulation (TFE) with plasma-enhanced atomic layer deposition (PEALD)-based Al2O3 for optoelectronics. A systematic analysis of the FAGPTi film on various substrates reveals that the FAGPTi films fully covered all parts of the substrate, showing low roughness, high hydrophobicity, and good flexibility. These results demonstrate that FAGPTi is able to protect water corrosive Al2O3 from the outer invasion of moisture or water. Therefore, the TFE with alternatively stacked Al2O3 and FAGPTi shows excellent barrier film performance as low as 6.33 × 10−5g m−2 day−1s at accelerated conditions (60 °C and 90% RH) and high visible transmittance above 95% in four pairs. In particular, the FAGPTi films displayed advanced side impermeability, with values comparable to those of the oxide layer. Thus, we expect our systematic work with FAGPTi layers to provide insights into barrier films to advance their integration in flexible optoelectronic devices and thereby accelerate their commercialization. In this study, we introduce a sol-gel based fluorinated nanohybrid materials named FAGPTi to fabricate organic-inorganic hybrid thin film encapsulation (TFE) with plasma-enhanced atomic layer deposition (PEALD)-based Al2O3 for optoelectronics. A systematic analysis of the FAGPTi film on various substrates reveals that the FAGPTi films fully covered all parts of the substrate, showing low roughness, high hydrophobicity, and good flexibility. These results demonstrate that FAGPTi is able to protect water corrosive Al2O3 from the outer invasion of moisture or water. Therefore, the TFE with alternatively stacked Al2O3 and FAGPTi shows excellent barrier film performance as low as 6.33 × 10-5 g m-2 day-1s at accelerated conditions (60 °C and 90% RH) and high visible transmittance above 95% in four pairs. In particular, the FAGPTi films displayed advanced side impermeability, with values comparable to those of the oxide layer. Thus, we expect our systematic work with FAGPTi layers to provide insights into barrier films to advance their integration in flexible optoelectronic devices and thereby accelerate their commercialization. KCI Citation Count: 2 In this study, we introduce a sol-gel based fluorinated nanohybrid materials named FAGPTi to fabricate organic-inorganic hybrid thin film encapsulation (TFE) with plasma-enhanced atomic layer deposition (PEALD)-based Al 2 O 3 for optoelectronics. A systematic analysis of the FAGPTi film on various substrates reveals that the FAGPTi films fully covered all parts of the substrate, showing low roughness, high hydrophobicity, and good flexibility. These results demonstrate that FAGPTi is able to protect water corrosive Al 2 O 3 from the outer invasion of moisture or water. Therefore, the TFE with alternatively stacked Al 2 O 3 and FAGPTi shows excellent barrier film performance as low as 6.33 × 10 −5 g m −2 day −1 s at accelerated conditions (60 °C and 90% RH) and high visible transmittance above 95% in four pairs. In particular, the FAGPTi films displayed advanced side impermeability, with values comparable to those of the oxide layer. Thus, we expect our systematic work with FAGPTi layers to provide insights into barrier films to advance their integration in flexible optoelectronic devices and thereby accelerate their commercialization. |
| Author | Kim, Juyoung Hong, Jisu Le, Hong Nhung Moon, Hong Chul Kwon, Hyeok-jin Park, Chan Eon Jung, Cheolmin Kim, Se Hyun |
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| Keywords | side permeation plasma-enhanced atomic layer deposition (PEALD) fluorinated thin film encapsulation (TFE) organic-inorganic nanohybrid materials sol-gel |
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| Snippet | In this study, we introduce a sol-gel based fluorinated nanohybrid materials named FAGPTi to fabricate organic-inorganic hybrid thin film encapsulation (TFE)... |
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| SubjectTerms | Aluminum oxide Atomic layer epitaxy Characterization and Evaluation of Materials Chemistry Chemistry and Materials Science Commercialization Complex Fluids and Microfluidics Encapsulation Fluorination Hydrophobicity Nanochemistry Nanotechnology Optoelectronic devices Permeability Physical Chemistry Polymer Sciences Soft and Granular Matter Sol-gel processes Substrates Thin films 고분자공학 |
| Title | Advanced Side-Impermeability Characteristics of Fluorinated Organic-Inorganic Nanohybrid Materials for Thin Film Encapsulation |
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