Overview of residual stress in MEMS structures: Its origin, measurement, and control

• Published in: Journal of materials science. Materials in electronics Vol. 32; no. 6; pp. 6705 - 6741
• Main Authors: Dutta, Shankar, Pandey, Akhilesh
• Format: Journal Article
• Language: English
• Published: New York Springer US 01.03.2021; Springer Nature B.V
• Subjects: Actuators; Characterization and Evaluation of Materials; Chemistry and Materials Science; Dissimilar materials; Dissimilar metals; Materials Science; Microelectromechanical systems; Optical and Electronic Materials; Reliability analysis; Residual stress; Review; Thick films; Thin films

Micro-electro-mechanical system (MEMS) technology has radically changed the scale, performance, and cost of a wide variety of sensors and actuators by taking advantage of batch fabrication. The multidisciplinary nature of MEMS employs knowledge of diverse technical areas to realize improved and nove...