Overview of residual stress in MEMS structures: Its origin, measurement, and control - Dutta, Shankar; Pandey, Akhilesh (Journal of materials science. Materials in electronics, 2021)
Keywords: Actuators; Characterization and Evaluation of Materials; Chemistry and Materials Science; Dissimilar materials; Dissimilar metals; Materials Science; Microelectromechanical systems; Optical and Electronic Materials; Reliability analysis; Residual stress; Review; Thick films; Thin films