APA (7th ed.) Citation

Dutta, S., & Pandey, A. (2021). Overview of residual stress in MEMS structures: Its origin, measurement, and control. Journal of materials science. Materials in electronics, 32(6), 6705-6741. https://doi.org/10.1007/s10854-021-05405-8

Chicago Style (17th ed.) Citation

Dutta, Shankar, and Akhilesh Pandey. "Overview of Residual Stress in MEMS Structures: Its Origin, Measurement, and Control." Journal of Materials Science. Materials in Electronics 32, no. 6 (2021): 6705-6741. https://doi.org/10.1007/s10854-021-05405-8.

MLA (9th ed.) Citation

Dutta, Shankar, and Akhilesh Pandey. "Overview of Residual Stress in MEMS Structures: Its Origin, Measurement, and Control." Journal of Materials Science. Materials in Electronics, vol. 32, no. 6, 2021, pp. 6705-6741, https://doi.org/10.1007/s10854-021-05405-8.