Large-Scale Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma-Enhanced Chemical Vapor Deposition

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Published inJapanese Journal of Applied Physics Vol. 41; no. Part 2, No. 12B; pp. L1488 - L1491
Main Authors Hayashi, Hiroyuki, Koga, Mizuho, Kashirajima, Jun, Takahashi, Kazumasa, Hayashi, Yasuaki, Nishino, Shigehiro
Format Journal Article
LanguageEnglish
Published 15.12.2002
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Author Koga, Mizuho
Kashirajima, Jun
Hayashi, Hiroyuki
Hayashi, Yasuaki
Takahashi, Kazumasa
Nishino, Shigehiro
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Title Large-Scale Synthesis of Aligned Carbon Nanotubes by Surface-Wave-Excited Microwave-Plasma-Enhanced Chemical Vapor Deposition
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