Mg and Ti codoping effect on the piezoelectric response of aluminum nitride thin films

• Published in: Scripta materialia Vol. 159; pp. 9 - 12
• Main Authors: Anggraini, Sri Ayu, Uehara, Masato, Yamada, Hiroshi, Akiyama, Morito
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 15.01.2019
• Subjects: Aluminum nitride; MgTi; Piezoelectric; Sputtering; Thin films; Thin films; MgTi; Piezoelectric; Sputtering; Aluminum nitride

Enhancement of the piezoelectric response (d33) of aluminum nitride (AlN) was attempted by incorporating Mg and/or Ti into AlN. Addition of either Mg or Ti as a single dopant was unable to effectively increase the d33 of AlN. However, the d33 could be augmented when both Mg and Ti were codoped into...