Mg and Ti codoping effect on the piezoelectric response of aluminum nitride thin films - Anggraini, Sri Ayu; Uehara, Masato; Yamada, Hiroshi; Akiyama, Morito (Scripta materialia, 2019)
Keywords: Aluminum nitride; MgTi; Piezoelectric; Sputtering; Thin films; Thin films; MgTi; Piezoelectric; Sputtering; Aluminum nitride