A Laterally Vibrating Lithium Niobate MEMS Resonator Array Operating at 500 °C in Air

• Published in: Sensors (Basel, Switzerland) Vol. 21; no. 1; p. 149
• Main Authors: Eisner, Savannah R., Chapin, Cailin A., Lu, Ruochen, Yang, Yansong, Gong, Songbin, Senesky, Debbie G.
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 29.12.2020; MDPI
• Subjects: Acoustics; high-temperature; Letter; lithium niobate; Microelectromechanical systems; piezoelectric resonators; RF MEMS; Sensors; SH0 mode; Signal processing; Thin films; United States > US; SH0 mode; lithium niobate; RF MEMS; piezoelectric resonators; high-temperature

This paper reports the high-temperature characteristics of a laterally vibrating piezoelectric lithium niobate (LiNbO3; LN) MEMS resonator array up to 500 °C in air. After a high-temperature burn-in treatment, device quality factor (Q) was enhanced to 508 and the resonance shifted to a lower frequen...