A Novel Single-Axis MEMS Tilt Sensor with a High Sensitivity in the Measurement Range from 0∘ to 360

• Published in: Sensors (Basel, Switzerland) Vol. 18; no. 2; p. 346
• Main Authors: Wang, Shudong, Wei, Xueyong, Weng, Yinsheng, Zhao, Yulong, Jiang, Zhuangde
• Format: Journal Article
• Language: English
• Published: Switzerland MDPI AG 25.01.2018; MDPI
• Subjects: double-ended tuning fork; MEMS; oscillator; resonator; Sensors; Strain gauges; tilt sensor; tilt sensor; MEMS; oscillator; double-ended tuning fork; resonator

In this paper, a novel single-axis MEMS tilt sensor is presented. It contains a hexagonal proof mass, six micro-lever force amplifiers and three double-ended-tuning fork (DETF) resonant strain gauges. The proof mass is placed in the center with the micro-levers and the DETFs radially arrayed around....